Browsing by Author "Knaepen, Werner"
- Results Per Page
- Sort Options
Publication AlON gate dielectric and gate trench cleaning for improved relia-bility of vertical GaN MOSFET
Proceedings paper2022, 12th International Conference on Integrated Power Electronics Systems - CIPS, 15th to 17th of March 2022Publication Crystallization resistance of barium titanate zirconate ultrathin films from aqueousCSD: a study of cause and effect
Journal article2009, Journal of Materials Chemistry, (19) 8, p.1115-1122Publication Electrical Stability of MOS Structures With AlON and Al2O3 Dielectrics Deposited on n-and p-Type GaN
Journal article2024, IEEE TRANSACTIONS ON ELECTRON DEVICES, (71) 9, p.5212-5217Publication Impact of sequential infiltration synthesis on pattern fidelity of DSA lines
; ; ; ; ; Proceedings paper2015, Advances in Patterning Materials and Processes XXXII, 22/02/2015, p.94250NPublication Improved cost-effectiveness of the block co-polymer anneal process for DSA
Proceedings paper2016, Alternative Lithographic Technologies VIII, 20/02/2016, p.97771ZPublication Integration of the Sequential Infiltration Synthesis (SIS) on Polyphtaladehyde (PPA) resist for thermal Scanning Probe Lithography (t-SPL) patterning
Proceedings paper2017, 43rd International Conference on Micro and Nanoengineering - MNE, 18/09/2017Publication Sequential infiltration synthesis for line edge roughness mitigation of EUV resist
Oral presentation2017, 34th International Conference of Photopolymer Science and TechnologyPublication Sequential infiltration synthesis for line edge roughness mitigation of EUV resist
Journal article2017, Journal of Photopolymer Science and Technology, (30) 6, p.667-670