Browsing by Author "Knaepen, Werner"
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Publication AlON gate dielectric and gate trench cleaning for improved relia-bility of vertical GaN MOSFET
Proceedings paper2022, 12th International Conference on Integrated Power Electronics Systems - CIPS, 15th to 17th of March 2022Publication Crystallization resistance of barium titanate zirconate ultrathin films from aqueousCSD: a study of cause and effect
Journal article2009, Journal of Materials Chemistry, (19) 8, p.1115-1122Publication Electrical Stability of MOS Structures With AlON and Al2O3 Dielectrics Deposited on n-and p-Type GaN
Journal article2024, IEEE TRANSACTIONS ON ELECTRON DEVICES, (71) 9, p.5212-5217Publication Impact of sequential infiltration synthesis on pattern fidelity of DSA lines
; ; ; ; ; Proceedings paper2015, Advances in Patterning Materials and Processes XXXII, 22/02/2015, p.94250NPublication Improved cost-effectiveness of the block co-polymer anneal process for DSA
Proceedings paper2016, Alternative Lithographic Technologies VIII, 20/02/2016, p.97771ZPublication Integration of the Sequential Infiltration Synthesis (SIS) on Polyphtaladehyde (PPA) resist for thermal Scanning Probe Lithography (t-SPL) patterning
Proceedings paper2017, 43rd International Conference on Micro and Nanoengineering - MNE, 18/09/2017Publication Sequential infiltration synthesis for line edge roughness mitigation of EUV resist
Journal article2017, Journal of Photopolymer Science and Technology, (30) 6, p.667-670Publication Sequential infiltration synthesis for line edge roughness mitigation of EUV resist
Oral presentation2017, 34th International Conference of Photopolymer Science and Technology