Browsing by Author "Li, Jie"
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Publication Atomic layer etching of InGaZnO thin films via plasma hydrocarbonation and oxygen radical reaction
Journal article2025-AUG 1, PLASMA SOURCES SCIENCE & TECHNOLOGY, (34) 8, p.085001Publication Conceptualizing the Contextual Dynamics of Safety Climate and Safety Culture Research: A Comparative Scientometric Analysis
Journal article2022, INTERNATIONAL JOURNAL OF ENVIRONMENTAL RESEARCH AND PUBLIC HEALTH, (19) 2, p.813Publication Dual-logic-in-memory implementation with orthogonal polarization of van der Waals ferroelectric heterostructure
Journal article2024, INFOMAT, (6) 2, p.Art. e12490Publication Hydrogenated amorphous carbon films deposited using plasma enhanced chemical vapor deposition processes
; Chae, HeeyeopJournal article review2023, KOREAN JOURNAL OF CHEMICAL ENGINEERING, (40) 6, p.1268-1276Publication In-Poor IGZO: Superior Resilience to Hydrogen in Forming Gas Anneal and PBTI
Journal article2025, ACS APPLIED ELECTRONIC MATERIALS, (7) 9, p.4210-4219Publication Investigation of Reactive Ion Etching Processes on Mg-Based Oxide Semiconductors: MgZnO
Journal article2025, ACS APPLIED ELECTRONIC MATERIALS, (7) 9, p.3744-3755Publication Plasma Etch of IGZO Thin Film and IGZO/SiO2 Interface Diffusion in Inductively Coupled CH4/Ar Plasmas
; ; ; ; ; Journal article2025, PLASMA PROCESSES AND POLYMERS, (22) 2, p.Art. 2400186Publication Reconfigurable Sequential-Logic-in-Memory Implementation Utilizing Ferroelectric Field-Effect Transistors
Journal article2025, ACS NANO, (19) 5, p.5493-5502Publication Road to energy-efficient optical access: GreenTouch final results
Journal article2016-11, Journal of Optical Communications and Networking, (8) 11, p.878-892Publication Sputter yield and stoichiometry study of InGaZnO film in ion beam etching
Journal article2025-MAY, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, (43) 3, p.033204Publication The Impact of Process Steps on Nearly Ideal Subthreshold Slope in 300-mm Compatible InGaZnO TFTs
Journal article2025, IEEE ELECTRON DEVICE LETTERS, (46) 5, p.761-764