Browsing by Author "Liu, Changze"
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Publication DTCO of Nanosheet and Forksheet Architectures: Exploring Dielectric Walls, Contacting Schemes, and Active Regions for Optimized RO Performance
Proceedings paper2024, 8th Electron Devices Technology & Manufacturing Conference (EDTM), MAR 03-06, 2024, p.226-228Publication Multi-VT Options at Scaled Vertical Pitch in Gate-All-Around Nanosheet Devices by Independent Inner-Outer Work-function Tuning
Proceedings paper2024, 8th Electron Devices Technology & Manufacturing Conference (EDTM), MAR 03-06, 2024, p.445-447Publication Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner- spacers and Epi-induced Stress: Understanding & Mitigating Process Risks
; ; ; ; ; Proceedings paper2021, 47th IEEE European Solid State Circuits Conference (ESSCIRC), SEP 13-22, 2021, p.55-58Publication Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner-spacers and Epi-induced Stress: Understanding & Mitigating Process Risks
Proceedings paper2021, IEEE 51st European Solid-State Device Research Conference (ESSDERC), SEP 06-09, 2021, p.55-58