Browsing by Author "Mack, P."
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Publication HfSiO(N) composition depth profiling: can we get a quantitative answer using SIMS?
Proceedings paper2005, SIMS XV - 15th International Conference on Secondary Ion Mass Spectrometry, 12/09/2005Publication Multitechnique characterisation of Al203 thin layers deposited on SiO2/Si surface by atomic layer chemical vapour deposition
Proceedings paper2003, AVS 4th International Conference on Microelectronics and Interfaces - ICMI, 3/03/2003, p.36-38Publication Nitrogen profiling in high-k layers has much to gain from a combined TOFSIMS-Angle resolved XPS combined study
Proceedings paper2005, SIMS XV - 15th International Conference on Secondary Ion Mass Spectrometry, 12/09/2005Publication Physical characterization of mixed HfAlOx layers by complementary analysis techniques
Journal article2004, Materials Science and Engineering B, 109, p.60-63Publication Physical characterization of thin HfO2 layers by the combined analysis with complementary techniques
Proceedings paper2003, Analytical Techniques for Semiconductor Materials and Processes, 27/04/2003, p.223-232