Browsing by Author "Maestre Caro, Arantxa"

Bottom-up engineering of subnanometer copper diffusion barriers using NH2-derived self assembled monolayers

Electrical properties of amino SAM layers studied with conductive AFM

Electroless Cu deposition on self-assembled monolayer alternative barriers

Electroless deposition on self-assembled monolayers as a method to enable fabrication of advanced interconnects

Enabling Cu-Cu connection in (dual) damascene interconnects by selective deposition of two different SAM molecules

Engineering self assembled monolayer as copper diffusion barrier: Cu/NH2-SAM/SiO2 interface characterization

Evaluation of metallization options for advanced Cu interconnects application

Exploration of SAMs (self-assembled monolayers) in advanced Cu interconnects

High quality NH2SAM (Self Assembled Monolayer) diffusion barrier for advanced copper interconnects

Materials engineering for future interconnects: catalyst-free electroless Cu deposition on self-assembled monolayer alternative barriers

Molecular engineering of surfaces for future device architectures using SAMs

Nanoscale selective silicon nanowires surface functionalization for sensing applications

Nanoscale silicon nanowires surface functionalization and characterization for sensing applications

NH2-terminated self-assembled monolayer as copper diffusion barrier: monolayer characterization

Screening self-assembled monolayers as Cu diffusion barriers

Selective self-assembled monolayer coating to enable Cu-to-Cu connection in dual damascene vias

Self-assembled monolayers as Cu diffusion barriers for advanced interconections: molecular engineering

Stiction-free poly-SiGe resonant biosensors for monolithic integration with CMOS

Temperature insensitive conductance detection with surface-functionalised silicon nanowire sensors

Temperature insensitive conductance detection with surface-functionalized silicon nanowire sensors