Browsing by Author "Mani, Antonio"
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Publication Characterizing and modeling electrical response to light for metal based EUV photoresists
Proceedings paper2016, Advances in Patterning Materials and Processes XXXIII, 21/02/2016, p.977906Publication Detection, binning, and analysis of defects in a GaN-on-Si process for high brightness light emitting diodes
Proceedings paper2012, 23rd Annual SEMI Advanced Semiconductor Manufacturing Conference - ASMC, 15/05/2012, p.106-109Publication Evolution of lithography-to-etch bias in multi-patterning processes
Publication GaN-on-Si process defect detection and analysis for HB-LEDs and power devices
Proceedings paper2013, 24th Annual SEMI Advanced Semiconductor Manufacturing Conference - ASMC, 13/05/2013, p.371-374Publication Interface sharpness in stacked thin film structures: a comparison of soft X-ray reflectometry and transmission electron microscopy
Journal article2024, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (23) 4, p.Art. 041405Publication Process window discovery, expansion and control of design hotspots susceptible to overlay failures
Proceedings paper2017, 28th Annual SEMI Advanced Semiconductor Manufacturing Conference - ASMC, 15/05/2017Publication Soft X-ray reflectometry for the inspection of interlayer roughness in stacked thin film structures
Proceedings paper2024, Conference on Metrology, Inspection, and Process Control XXXVIII, FEB 26-29, 2024, p.Art. 1295507Publication XAS photoresists electron/quantum yields study with synchrotron light
Proceedings paper2015, Advances in Patterning Materials and Processes XXXII, 22/02/2015, p.942507