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Browsing by Author "Mebarki, Bencherki"

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    Barrier integrity effect on leakage mechanism and dielectric reliability of copper/OSG interconnects

    Li, Yunlong  
    ;
    Tokei, Zsolt  
    ;
    Mandrekar, T.
    ;
    Mebarki, Bencherki
    ;
    Groeseneken, Guido  
    ;
    Maex, Karen  
    Proceedings paper
    2005, Materials, Technology, and Reliability of Advanced Interconnects Interconnects, 28/03/2005, p.265-270
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    Barrier reliability on sub-100nm copper low-k interconnects

    Tokei, Zsolt  
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    Gailledrat, T.
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    Li, Yunlong  
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    Schuhmacher, Jorg
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    Mandrekar, T.
    ;
    Guggilla, S.
    Oral presentation
    2004, Advanced Metallization Conference
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    Barrier studies on porous silk semiconductor dielectric

    Tokei, Zsolt  
    ;
    Iacopi, Francesca
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    Richard, Olivier  
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    Waeterloos, Joost
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    Rozeveld, S.
    ;
    Beach, E.
    Journal article
    2003, Microelectronic Engineering, (70) 2_4, p.352-357
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    Copper seed layer scaling for advanced interconnects: extendibility of I-PVD

    Tokei, Zsolt  
    ;
    Demuynck, Steven  
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    Vervoort, Iwan
    ;
    Mebarki, Bencherki
    ;
    Mandrekar, T.
    ;
    Guggilla, S.
    Proceedings paper
    2003, Proceedings of the Advanced Metallization Conference 2002, 1/10/2002, p.403-407
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    Ni-based silicides for 45 nm CMOS and beyond

    Lauwers, Anne  
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    Kittl, Jorge
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    Van Dal, Mark  
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    Chamirian, Oxana
    ;
    Kmieciak, Malgorzata
    Journal article
    2004, Materials Science and Engineering B, 114-115, p.29-41
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    Reliability studies of MOCVD TiSin and EnCoRe Ta(N)/Ta

    Tokei, Zsolt  
    ;
    Kelleher, Deirdre Maria
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    Mebarki, Bencherki
    ;
    Mandrekar, T.
    ;
    Guggilla, S.
    Journal article
    2003, Microelectronic Engineering, (70) 2_4, p.358-362

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