Browsing by Author "Parsons, Gregory"

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Parsons, Gregory

Meeting abstract

2018, 3rd Area Selective Deposition Workshop - ASD, 29/04/2018, p.24-24

Publication

Area-selective atomic layer deposition of TiN, TiO2, and HfO2 on Si3N4 in Sub-50 nanometer Si3N4/amorphous carbon structures

Stevens, Eric

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Parsons, Gregory

Meeting abstract

2018, 18th International Conference on Atomic Layer Deposition-ALD. Featuring the 5th International Atomic Layer Etching Workshop, 29/07/2018, p.AS-TuM5

Publication

Area-selective atomic layer deposition of TiN, TiO2, and HfO2 on silicon ntride with inhibition on amorphous carbon

Stevens, Eric

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Parsons, Gregory

Journal article

2018, Chemistry of Materials, (30) 10, p.3223-3232

Publication

Growth inhibition of metal oxide ALD on advanced patterning film (APF) for tone reversal of HfO2 and TiO2 patterned structures

Stevens, Eric

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