Browsing by Author "Petersen, Dirch Hjorth"
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Publication Apparent size effects on dopant activation in nanometer-wide Si fins
Journal article2021, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, (39) 2, p.Art. 023202Publication Hall effect measurement for precise sheet resistance and thickness evaluation of Ruthenium thin films using non-equidistant four-point probes
Publication Systematic study of shallow junction formation on germanium substrates
Journal article2011, Microelectronic Engineering, (88) 4, p.347-350Publication Systematic study of shallow junction formation on Germanium substrates
Meeting abstract2010, E-MRS Spring Meeting Symposium H: Post-Si CMOS Electronic Devices: The Role of Ge and III-V Materials, 7/06/2010Publication Ultra shallow arsenic junctions in germanium formed by millisecond laser annealing
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