Browsing by Author "Porti, Marc"

A conductive AFM nanoscale analysis of NBTI and channel hot-carriers degradation in MOSFETs

Channel hot-carriers degradation in MOSFETs: A conductive AFM study at the nanoscale

Channel-hot-carrier degradation of strained MOSFETs: a device level and nanoscale combined approach

Comparison of standard macroscopic and Conductive AFM leakage measurements on gate removed high-k capacitors

Improved characterization of high-k degradation with vacuum C-AFM

Influence of vacuum environment on conductive atomic force microscopy measurements of advanced metal-oxide-semiconductor gate dielectrics

Nanometer-scale leakage measurements in high vacuum on de-processed high-k capacitors

Nanoscale and device level electrical behavior of annealed ALD Hf-based gate oxide stacks grown with different precursors

Nanoscale effects of annealing on the electrical characteristic of hafnium based devices measured in a vacuum environment