Browsing by Author "Richter, H."
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Publication Grown-in defect density spectra in czochralski silicon wafers
Publication Infrared studies of oxygen precipitation related defects in silicon after various thermal treatments
Publication Investigation of crystal defects in As-grown and processed silicon wafers and heteroepitaxial layers by infrared light scattering
Publication Investigation of oxygen precipitation related crystal defects in processed silicon wafers by infrared light scattering tomography
Journal article1996, Materials Science and Engineering B, B36, p.225-229Publication IR-LST a powerful non-invasive tool to observe crystal defects in as-grown silicon, after device processing, and in heteroepitaxial layers
Publication Lattice defects in high quality as-grown CZ silicon, studied with light scattering and preferential etching techniques
; ; Lambert, U.Proceedings paper1995, Proceedings 18th International Conference on Defects in Semiconductors - ICDS-18; July 23 -28, 1995; Sendai, Japan., 23/07/1995, p.1755-1760Publication Light scattering tomography study of lattice defects in high quality as-grown Cz silicon wafers and their evolution during gate oxidation
; ; Lambert, U.Proceedings paper1996, Defect Recognition and Image Processing in Semiconductors - DRIP. Proceedings of the 6th International Conference, 3/12/1995, p.331-336Publication Multichannel optical modules compatible with the fibre in board technology
Publication Observation of stacking faults and prismatic punching systems in silicon by light scattering tomography
Publication Process modelling
Publication Stresses in strained GeSi stripes: calculation and determination from Raman measurements