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Browsing by Author "Ryan, Paul"

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    Asymmetric relaxation of SiGe in patterned Si line structures

    Wormington, Matthew
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    Lafford, Tamzin
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    Godny, Stephane
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    Ryan, Paul
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    Loo, Roger  
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    Bhouri, Nada
    Proceedings paper
    2007, International Conference on Frontiers of Characterization and Metrology for Nanoelectronics at NIST, 27/03/2007
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    High resolution X-ray diffraction for in-line monitoring of Ge MOSFET devices

    Ryan, Paul
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    Womington, Matthew
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    Sun, Jianwu
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    Hikavyy, Andriy  
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    Shimura, Yosuke
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    Witters, Liesbeth  
    Proceedings paper
    2015, International Conference on Frontiers of Characterization and Metrology for Nanoelectronics - FCMN, 14/04/2015, p.217-219
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    In-line characterization of heterojunction bipolar transistor base layers by high-resolution X-ray diffraction

    Nguyen, Duy
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    Loo, Roger  
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    Hikavyy, Andriy  
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    Van Daele, Benny
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    Ryan, Paul
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    Wormington, Matthew
    Proceedings paper
    2007, Analytical Techniques for Semiconductor Materials and Process Characterization 5 - ALTECH, 13/09/2007, p.151-160
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    In-line characterization of heterojunction bipolar transistor base layers by high-resolution x-ray diffraction

    Nguyen, Duy
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    Loo, Roger  
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    Hikavyy, Andriy  
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    Van Daele, Benny
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    Ryan, Paul
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    Wormington, Paul
    Oral presentation
    2007, 3rd International Workshop on New Group IV Semiconductor Nanoelectronics
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    Observation and understanding of anisotropic strain relaxation in selectively grown SiGe fin structures

    Schulze, Andreas
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    Loo, Roger  
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    Ryan, Paul
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    Wormington, Matthew
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    Favia, Paola  
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    Witters, Liesbeth  
    Journal article
    2017, Nanotechnology, (28) 14, p.145703
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    Processing technologies for advanced Ge devices

    Loo, Roger  
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    Hikavyy, Andriy  
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    Witters, Liesbeth  
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    Schulze, Andreas
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    Arimura, Hiroaki  
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    Cott, Daire  
    Journal article
    2017, ECS Journal of Solid State Science and Technology, (6) 1, p.14-20
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    Processing technologies for advanced Ge devices

    Loo, Roger  
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    Hikavyy, Andriy  
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    Witters, Liesbeth  
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    Schulze, Andreas
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    Arimura, Hiroaki  
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    Cott, Daire  
    Proceedings paper
    2016-09, SiGe, Ge, and Related Materials: Materials, Processing, and Devices 7, 2/10/2016, p.491-503
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    Processing technologies for advanced Ge devices

    Loo, Roger  
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    Hikavyy, Andriy  
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    Witters, Liesbeth  
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    Schulze, Andreas
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    Arimura, Hiroaki  
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    Cott, Daire  
    Meeting abstract
    2016-10, PRiME 2016 - 230th ECS Meeting (Fall) - Electrochemical Society: SiGe, Ge & Related Compounds: Materials, Processing and Devices, 2/10/2016, p.1982
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    Selective-area metal organic vapor-phase epitaxy of InGaAs/InP heterostructures on Si for advanced CMOS devices

    Merckling, Clement  
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    Waldron, Niamh  
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    Jiang, Sijia
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    Guo, Weiming
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    Ryan, Paul
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    Collaert, Nadine  
    Proceedings paper
    2014, Dielectrics for Nanosystems 6: Materials Science, Processing, Reliability and Manufacturing, 11/05/2014, p.107-112
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    Strain and composition monitoring in various (Si)Ge fin structures using in-line HRXRD

    Schulze, Andreas
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    Loo, Roger  
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    Witters, Liesbeth  
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    Mertens, Hans  
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    Collaert, Nadine  
    Meeting abstract
    2017, Frontiers of Characterization and Metrology for Nanoelectronics - FCMN, 21/03/2017
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    Strain and compositional analysis of (Si)Ge fin structures using high resolution X-ray diffraction

    Schulze, Andreas
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    Loo, Roger  
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    Witters, Liesbeth  
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    Mertens, Hans  
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    Gawlik, Andrzej  
    Journal article
    2017, Physica Status Solidi C, (14) 12, p.1700156
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    Use of X-ray techniques in the development and production of novel transistor structures

    Hikavyy, Andriy  
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    Rosseel, Erik  
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    Witters, Liesbeth  
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    Mertens, Hans  
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    Ryan, Paul
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    Langer, Robert  
    Proceedings paper
    2014, 7th International SiGe Technology and Device Meeting - ISTDM, 2/06/2014, p.39-40
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    Use of X-ray techniques in the development of Ge MOSFET devices

    Sun, Jianwu
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    Hikavyy, Andriy  
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    Shimura, Yosuke
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    Witters, Liesbeth  
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    Tielens, Hilde  
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    Ryan, Paul
    Meeting abstract
    2014, EMRS Fall Meeting, Symposium J: Alternative Semiconductor Integration in Si Microelectronics: Materials, Techniques & Appl., 15/09/2014

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