Browsing by Author "Schwitters, Michael"
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Publication Composition control and ferroelectric properties of sidewall Sr0.8Bi2.2Ta2O9 in integrated 3-Dimensional ferroelectric capacitors
Proceedings paper2005, Proceedings 1st International Conference on Memory Technology and Design, 21/05/2005, p.163-166Publication Composition control and ferrolectric properties of sidewalls in three-dimensional SrBi2Ta2O9-based ferroelectric capacitors
Journal article2005-09, Journal of Applied Physics, (98) 5, p.054507-1-054507-7Publication Dependency of the properties of SrxBiyTa2O9 thin films on the Sr and Bi stoichiometry
Publication Excellent reliability properties of 0.81mm2 integrated SBT fecap's with 3-D structure
Oral presentation2005, 7th International Symposium on Integrated FerroelectricsPublication Influence of dry-etch patterning of top electrode and SrBi2Ta2O9 on the properties of ferroelectric capacitors
Journal article2005, Journal of the Electrochemical Society, (152) 12, p.C865-C869Publication Integration of ferroelectric SrBi2Ta2O9-based capacitors beyond 0.18 CMOS technology
Oral presentation2003, Conference of Surface Science and their Applications - CLACSA-11Publication Integration of ferroelectric SrBi2Ta2O9-based capacitors in 0.35 μm CMOS technology
Journal article2004, Physica Status Solidi C, (1) S1, p.S78-S82Publication Integration of SrBi2Ta2O9 (SBT) based FRAM capacitors: plasma etch issues and solutions
Oral presentation2004, E-MRS Spring Meeting Symposium D: Functional Oxides for Advanced Semiconductor TechnologiesPublication MOCVD-SBT thin films for advanced FeRAM: deposition and film formation processes
Publication Sidewalls contribution in integrated three-dimensional Sr0.8Bi2.2Ta2O9-based ferroelectric capacitors
Journal article2005, Applied Physics Letters, (87) 7, p.073502-1-073502-3