Browsing by Author "Smith, Jeffrey"
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Publication Enabling complimentary FET (CFET) fabrication: selective, isotropic etch of Group IV semiconductors
Meeting abstract2019, Advanced Etch Technology for Nanopatterning VIII, 24/02/2019, p.109630LPublication Plasma etch selectivity study and material screening for Self-Aligned Gate Contact (SAGC)
Proceedings paper2019, Advanced Etch Technology for Nanopatterning VIII, 24/02/2019, p.109630PPublication PPAC scaling enablement for 5nm Mobile SoC technology
Publication Ruthenium recess for buried power rail integration
Meeting abstract2019, IITC-MAM 2019, 3/06/2019, p.4.08Publication Selective isotropic etching of Group IV semiconductors to enable gate all around device architectures
Meeting abstract2018, Surface Preparation and Cleaning Conference - SPCC, 10/04/2018