Browsing by Author "Somervell, Mark"
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Publication Addressing the challenges of Directed Self Assembly implementation
Proceedings paper2011, International Symposium on Lithography Extensions, 20/10/2011Publication Advances and challenges in dual-tone development process optimization
Proceedings paper2009, Optical Microlithography XXII, 22/02/2009, p.72740IPublication Advances in dual-tone development for pitch frequency doubling
Proceedings paper2010, Optical Microlithography XXIII, 21/02/2010, p.76400EPublication Advances in process optimization for dual-tone development as a double patterning technique
Proceedings paper2008, 5th International Symposium on Immersion Lithography Extensions, 22/09/2008Publication All track directed self-assembly of block copolymers: process flow and origin of defects
Proceedings paper2012, Alternative Lithographic Technologies IV, 12/02/2012, p.83230DPublication Comparison of directed self-assembly integrations
Proceedings paper2012, Advances in Resist Materials and Processing Technology XXIX, 12/02/2012, p.83250GPublication Contact hole CD uniformity repair through directed self-assembly of cylindrical phase block copolymers
Oral presentation2012, MRS Fall M eeting Symposium S: Directed Self-Assembly for NanopatterningPublication Defect capture sensitivity in 14 nm half-pitch line/space DSA patterns
Meeting abstract2014, Micro and Nano Engineering Conference - MNE, 22/09/2014Publication Defect reduction and defect stability in imec's 14nm half pitch chemo-epitaxy DSA flow
Proceedings paper2014, Alternative Lithographic Technologies VI, 24/02/2014, p.904905Publication Determination of critical parameters for control of directed self-assembly of block copolymers using frequency multiplication
Oral presentation2012, 38th International Conference on Micro and NanoEngineering - MNEPublication Determination of critical parameters for control of directed self-assembly of block copolymers using frequency multiplication
Oral presentation2012, Conference on Photopolymer Science and TechnologyPublication DSA materials contributions to the defectivity performance of the 14nm half-pitch LiNe flow @ imec
; ; Publication EUV RLS performance tradeoffs for a polymer bound PAG resist process
Proceedings paper2009, International Symposium on Extreme Ultraviolet Lithography, 18/10/2009Publication Evaluation of integration schemes for contact-hole grapho-epitaxy DSA: a study of substrate and template affinity control
Proceedings paper2014, Alternative Lithographic Technologies VI, 23/02/2014, p.90491LPublication Frequency mulitiplication of lamellar phase block copolymers with grapho-epitaxy directed self-assembly sensitivity to prepattern
Journal article2012, Journal of Micro/Nanolithography MEMS and MOEMS, (11) 3, p.31303Publication Implementation of directed self-assembly of block copolymers in the fab for defectivity analysis
Oral presentation2012, FujiFilm Litho WorkshopPublication Implementation of self-assembly in a 300mm processing environment
Oral presentation2012, IEEE Litho WorkshopPublication Implementation of templated DSA for via layer patterning at the 7 nm node
Proceedings paper2015, Alternative Lithographic Technologies VII, 23/02/2015, p.942305Publication Kinetics of defect annihilation in directed self-assembly of block copolymers using chemically nano-patterned surfaces
Meeting abstract2014, SPIE Advanced Lithography 2014, 23/02/2014Publication Origin of defect in directed self-assembly of block copolymers using feature multiplication
; ; Lin, GuanyangProceedings paper2013, IEEE Litho Workshop, 11/11/2013