Browsing by Author "Stevens, Eric"
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Publication Area selective atomic layer deposition: a bottom-up approach for patterning
Meeting abstract2018, Materials for Advanced Metallization Conference - MAM, 18/03/2018, p.02KPublication Area-selective atomic layer deposition of TiN, TiO2, and HfO2 for advanced thin film patterning by delayed nucleation on plasma-treated amorphous carbon
Meeting abstract2018, 3rd Area Selective Deposition Workshop - ASD, 29/04/2018, p.24-24Publication Area-selective atomic layer deposition of TiN, TiO2, and HfO2 on Si3N4 in Sub-50 nanometer Si3N4/amorphous carbon structures
Meeting abstract2018, 18th International Conference on Atomic Layer Deposition-ALD. Featuring the 5th International Atomic Layer Etching Workshop, 29/07/2018, p.AS-TuM5Publication Area-selective atomic layer deposition of TiN, TiO2, and HfO2 on silicon ntride with inhibition on amorphous carbon
Journal article2018, Chemistry of Materials, (30) 10, p.3223-3232Publication Growth inhibition of metal oxide ALD on advanced patterning film (APF) for tone reversal of HfO2 and TiO2 patterned structures
Proceedings paper2017, 17th International Conference on Atomic Layer Deposition - ALD, 15/07/2017