Browsing by Author "Van Barel, Greg"
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Publication Fabrication scheme for the in-situ mechanical characterization of freestanding MEMS structural layers, applied to Poly-SiGe
Meeting abstract2007-03, Materials for Advanced Metallization - MAM, 4/03/2007, p.1-2Publication In-situ characterization of mechanical properties of MEMS structural layers using different test approaches, with application to thick poly-SiGe
Van Barel, GregPHD thesis2011-09Publication Investigation of intrinsic stress effects in cantilever structures
Publication Processing and characterisation of poly-SiGe micromachined resonators and comparison with SOI
Proceedings paper2008, Eurosensors XXII, 7/09/2008, p.831-834Publication Stacked boron doped poly-crystalline silicon-germanium layers: an excellent MEMS structural layer
Proceedings paper2008, Passive and Electromechanical Materials and Integration, 24/03/2008, p.1075-J05-02Publication The influence of geometrical imperfections in micromachined cantilevers on the extracted Young's modulus using a simple model
Journal article2008, Journal of Micromechanics and Microengineering, (18) 11, p.115027Publication The influence of geometrical non-idealities in surface micro fabricated MEMS test structures on the extracted Young's modulus using analytical expressions assuming ideal boundary conditions