Browsing by Author "Van Ommen, Ruud"
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Publication Defect mitigation solution for area-selective ALD of Ru on TiN/SiO2 nanopatterns
Oral presentation2019, ALD 2019Publication Diffusion-mediated growth and size-fependent nanoparticle reactivity during ruthenium atomic layer deposition on dielectric substrates
Journal article2018, Advanced Materials Interfaces, (5) 24, p.1800870Publication Diffusion-mediated nucleation behaviour of ruthenium atomic layer deposition on dielectrics
Meeting abstract2018, Area Selective Deposition Workshop - ASD, 29/04/2018Publication From fundamental insights into growth and nucleation mechanisms to area-selective deposition
Meeting abstract2018, AVS - american vacuum society international symposium and exhibition, 21/10/2018, p.TF+AM+EM+PS-TuM1Publication Insight in growth mechanism of Ru ALD on dielectrics
Meeting abstract2018, 18th International Conference on Atomic Layer Deposition - ALD, 29/07/2018Publication Selectivity Enhancement for Ruthenium Atomic Layer Deposition in Sub-50 nm Nanopatterns by Diffusion and Size-Dependent Reactivity
Journal article2021-08-11, ADVANCED MATERIALS INTERFACES, (8) 20, p.2100846Publication Surface diffusion for defect mitigation during area-selective deposition of Ru
; ; ; Meeting abstract2019, ASD 2019, 4/04/2019