Browsing by Author "Vanormelingen, Koen"
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Publication Characterization of high-throughput spatial ALD Al2O3 as surface passivation for industrial local Al BSF Si solar cells
Proceedings paper2011, 26th European Photovoltaic Solar Energy Conference and Exhibition - EU PVSEC, 5/09/2011, p.2189-2190Publication Electrical demonstration of thermally stable Ni silicides on Si1-xCx epitaxial layers
Journal article2010, Microelectronic Engineering, (87) 3, p.306-310Publication Emissivity independent heating of 3D patterns
Proceedings paper2007, Extended Abstracts of the 7th International Workshop on Junction Technology - IWJT, 8/06/2007, p.141-142Publication First electrical demonstration of DRAM compatible Ni silicides
Oral presentation2009, 18th Workshop Materials for Advanced Metallization - MAMPublication H2S exposure of a (100)Ge surfaces: evidences for a (2x1) electrically passivated surface
Journal article2007, Applied Physics Letters, (90) 22, p.222105Publication Improved thermal stability of Ni-silicides on Si:C epitaxial layers
Journal article2007, Microelectronic Engineering, 84, p.2542-2546Publication Manufacturability aspects in low-temperature nickel silicidation: temperature control and repeatability
Journal article2007, Microelectronic Engineering, (84) 11, p.2572-2574Publication Pattern-dependent heating of 3D structures
Publication Thermal stability of Pt and C-doped NiSi films
Proceedings paper2007, 15th IEEE Conference on Advanced Thermal Processing of Semiconductors - RTP, 2/10/2007, p.145-149Publication Widening of FUSI RTP process window by spike anneal
Proceedings paper2007, 15th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP, 2/10/2007, p.111-117