Browsing by Author "Whelan, Caroline"
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Publication A novel approach to characterise a low-k dielectric polymer surface
Proceedings paper2002, 2nd International Symposium on Polymers Surface Characterization, 11/11/2002Publication A novel approach to characterization of a low-k dielectric polymer surface
Publication A study of growth mechanism of TiN and WCN barrier films deposited by atomic layer deposition on different substrates
Meeting abstract2002, B-ALD-5: The 5th Baltic Symposium on Atomic Layer Deposition, 24/10/2002, p.21Publication A thermal stability study of Alkane and aromatic thiolate self-assembled monolayers on copper surfaces
Journal article2004, Superlattices and Microstructures, (36) 1_3, p.149-160Publication Atomic layer deposited barriers for copper interconnects
Meeting abstract2004, AVS 51 International Symposium, 14/11/2004, p.TF-MoM1Publication Carbon nanotube catalysis by metal silicide: resolving inhibition versus growth
Journal article2007, Nanotechnology, (18) 1, p.15602Publication Characterisation of JSR's spin-on hardmask FF-02
Journal article2003, Microelectronic Engineering, (70) 2_4, p.308-313Publication Characterization of the growth of atomic layer deposited WNxCy films on various substrates
Publication Chemical versus electrostatic forces: characterization of different types of polymer-silica composite naoparticles
Proceedings paper2004, International Symposium on Surface and Colloid Chemistry Applied to Nanoscience, 18/11/2004, p.18Publication Composite polymer core – ceria shell abrasive particles during silicon oxide CMP
Proceedings paper2007, Advances and Challenges in Chemical Mechanical Planarization, 8/04/2007, p.C8.4Publication Composite polymer core–silica shell abrasives: effect of polishing time and slurry solid content on oxide CMP
Journal article2007, Electrochemical and Solid State Letters, (10) 9, p.H243-H247Publication Composite polymer core-silica shell abrasives: the effect of the shape of the silica particles on oxide CMP
Journal article2008, Journal of the Electrochemical Society, (155) 6, p.H401-H406Publication Composite polymer-core silica-shell abrasive particles during oxide CMP: a defectivity study
Journal article2007, Journal of The Electrochemical Society, (154) 8, p.H667-H371Publication Copper CMP with composite polymer core - silica shell abrasives: A defectivity study
Journal article2009, Journal of the Electrochemical Society, (156) 1, p.H18-H26Publication Copper CMP with composite polymer core – silica shell abrasives: a defectivity study
Meeting abstract2008, Materials Research Society Spring Meeting Symposium N: Materials and Processes for Advanced Interconnects for Microelectronics, 23/03/2008, p.N11.4Publication Copper CMP with composite polymer core – silica shell abrasives: a defectivity study
Proceedings paper2008, Materials and Processes for Advanced Interconnects for Microelectronics, 24/03/2008, p.1079-N11-04Publication Corrosion and inhibition of WNxCy barrier during chemical mechanical planarization
Journal article2005, Journal of the Electrochemical Society, (152) 12, p.B512-B518Publication Corrosion inhibition by self-assembled monolayers for enhanced wire bonding on Cu surfaces
Journal article2003, Microelectronic Engineering, (70) 2_4, p.551-557Publication Corrosion inhibition by thiol-derived SAMs for enhanced wire bonding on Cu surfaces
Journal article2004, J. Electrochem. Soc., (151) 2, p.B33-B38Publication Cu adsorption on carboxylic acid-terminated self-assembled monolayers: a high-resolution X-ray photoelectron spectroscopy study
Journal article2004, Thin Solid Films, 464-465, p.388-392
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