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Browsing by Author "Wise, Rick"

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    Defect-free isolation on high-thermal-conductivity SOI substrates for complementary BiCMOS technology

    Van Wichelen, Koen
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    Ong, Patrick  
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    Moussa, Alain  
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    Radisic, Dunja  
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    Devriendt, Katia  
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    Halder, Sandip  
    Proceedings paper
    2009, International Conference on Solid State Devices and Materials - SSDM, 6/10/2009, p.824-825
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    Impact of the pre-epi bake conditions in embedded Si1-xGex source/drain junctions

    Bargallo Gonzalez, Mireia
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    Simoen, Eddy  
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    Hikavyy, Andriy  
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    Verheyen, Peter  
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    Loo, Roger  
    Meeting abstract
    2009, E-MRS Spring Meeting Symposium I: Silicon and germanium Issues for Future CMOS Devices, 8/06/2009
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    Leakage current study of Si1-xCx embedded source/drain junctions

    Simoen, Eddy  
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    Vissouvanadin Soubaretty, Bertrand
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    Taleb, Nadjib
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    Bargallo Gonzalez, Mireia
    Journal article
    2008, Applied Surface Science, (254) 19, p.6140-6143
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    Sandwich stacks replacing SiO2 in standard bonded Si-on-insulator (SOI) substrates to obtain a high-thermal conductivity HTC-SOI substrate

    Van Wichelen, Koen
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    Schaekers, Marc  
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    Decoutere, Stefaan  
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    Seacrist, Mike
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    Drobny, Vladimir
    Proceedings paper
    2008, IEEE International SOI Conference Proceedings, 6/10/2008, p.67-68
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    Strain enhanced nMOS using in-situ doped embedded Si:C S/D stressors with up to 1.5% substitutional carbon content grown using a novel deposition process

    Verheyen, Peter  
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    Kerner, Christoph  
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    Clemente, Francesca
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    Bender, Hugo  
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    Shamiryan, Denis
    Proceedings paper
    2008, 4th International SiGe Technology and Device Meeting, 11/05/2008
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    Stress analysis of Si1-xGex embedded source/drain junctions

    Bargallo Gonzalez, Mireia
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    Simoen, Eddy  
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    Naka, N.
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    Okuno, Y
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    Eneman, Geert  
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    Hikavyy, Andriy  
    Journal article
    2008, Materials Sicience in Semiconductor Processing, (11) 5, p.285-290

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