Browsing by Author "Wong, H.-S. Philip"
Now showing 1 - 7 of 7
- Results per page
- Sort Options
Publication Density-balancing mask sssignment for via patterning with directed self-assembly
Publication Design method and algorithms for directed self-assembly aware via layout decomposition in sub-7 nm circuits
Journal article2016-11, Journal of Micro/Nanolithography MEMS and MOEMS, (15) 4, p.43506Publication Design strategy for integrating DSA via patterning in sub-7 nm interconnects
Proceedings paper2016, Design-Process-Technology Co-optimization for Manufacturability X, 21/02/2016, p.97810NPublication Design strategy for layout of Sub-Resolution Directed Self-Assembly Assist Features (SDRAFs)
Proceedings paper2016, Electron, Ion, and Photon Beam Technology and Nanofrabrication - EIPBN, 31/05/2016, p.5C4Publication Experimental study of sub-DSA resolution assist features (SDRAF)
Proceedings paper2015, Alternative Lithographic Technologies VII, 22/02/2015, p.94231FPublication Templated DSA vias in sub-7 nm circuits: Design strategy and DSA-aware via decomposition
Proceedings paper2016-10, International Symposium on DSA, 11/10/2016Publication Understanding energy efficiency benefits of carbon nanotube field-effect transistors for digital VLSI
Journal article2018, IEEE Transactions on Nanotechnology, (17) 6, p.1259-1269