Browsing by Author "van Berkum, J.G.M."
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Publication Laser annealing for ultra-shallow junction formation in advanced CMOS
Proceedings paper2002, Rapid Thermal And Other Short-Time Processing Technologies III, 12/05/2002, p.413-426Publication Local traps as nanoscale reaction-diffusion probes: B clustering in c-Si
Journal article2014, Applied Physics Letters, (105) 22, p.221603Publication Properties of HfTaxOy high-k layers deposited by ALCVD
Publication Silicides for advanced CMOS devices
Proceedings paper2005, Microscopy of Semiconducting Materials. Proceedings of the 14th Conference, 11/04/2005, p.379-388Publication Tantalum-based gate electrode metals for advanced CMOS devices
Proceedings paper2005, Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS: New Materials, Processes, and Equipment, 15/05/2005, p.215-224Publication The relation between phase formation and onset of thermal degradation in nano-scale CoSi2-polycrystalline silicon structures
Journal article2004-12, Journal of Applied Physics, (96) 12, p.7568-7573