Browsing by author "Chiodarelli, Nicolo"
Now showing items 1-20 of 31
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3D electrical characterization of CNT-based interconnects
Schulze, Andreas; Hantschel, Thomas; Dathe, Andre; Chiodarelli, Nicolo; Eyben, Pierre; Vandervorst, Wilfried (2011) -
A CMOS compatible carbon nanotube growth approach
Cott, Daire; Chiodarelli, Nicolo; Vereecken, Philippe; Vereecke, Bart; Van Elshocht, Sven; De Gendt, Stefan (2010) -
ALD of Al2O3 for carbon nanotube vertical interconnect and its impact on the electrical properties
Chiodarelli, Nicolo; Delabie, Annelies; Masahito, Sugiura; Kashiwagi, Yusaku; Richard, Olivier; Bender, Hugo; Cott, Daire; Heyns, Marc; De Gendt, Stefan; Groeseneken, Guido; Vereecken, Philippe (2011) -
Alternative photoresist removal process to minimize damage of low-k material induced by ash plasma
Le, Quoc Toan; Keldermans, Johan; Chiodarelli, Nicolo; Kesters, Els; Lux, Marcel; Claes, Martine; Vereecke, Guy (2008) -
Alternative photoresist removal process to minimize damage of low-k material induced by ash plasma
Le, Quoc Toan; Keldermans, Johan; Chiodarelli, Nicolo; Kesters, Els; Lux, Marcel; Claes, Martine; Vereecke, Guy (2007-11) -
Carbon nanotube interconnects: Electrical characterization of 150 nm CNT contacts with Cu damascene top contact
Chiodarelli, Nicolo; van der Veen, Marleen; Vereecke, Bart; Cott, Daire; Groeseneken, Guido; Vereecken, Philippe; Huyghebaert, Cedric; Tokei, Zsolt (2011-05) -
Catalyzed CVD growth of carbon nanotubes
van der Veen, Marleen; Cirillo, Marco; Chiodarelli, Nicolo; De Henau, Katia; Riskin, Alexander; Van Bael, Marlies; Hens, Zeger; De Gendt, Stefan; Vereecken, Philippe (2009) -
Cleaning of post-etch photoresist layer on patterned surface using organic solvent combined with physical forces
Le, Quoc Toan; Chiodarelli, Nicolo; Blum, Ivan; Kesters, Els; Lux, Marcel; Claes, Martine; Vereecke, Guy; Mertens, Paul (2007-04) -
CMP of novel materials
Ong, Patrick; Kellens, Kristof; Chiodarelli, Nicolo; Meuris, Marc; Leunissen, Peter (2009) -
Correlation between number of walls and diameter in multiwall carbon nanotubes grown by chemical vapor deposition
Chiodarelli, Nicolo; Richard, Olivier; Bender, Hugo; Heyns, Marc; De Gendt, Stefan; Groeseneken, Guido; Vereecken, Philippe (2012) -
Electrical characterization of CNT contacts with Cu damascene top contact
van der Veen, Marleen; Vereecke, Bart; Huyghebaert, Cedric; Cott, Daire; Masahito, Sugiura; Kashiwagi, Yusaku; Teugels, Lieve; Caluwaerts, Rudy; Chiodarelli, Nicolo; Vereecken, Philippe; Beyer, Gerald; Heyns, Marc; De Gendt, Stefan; Tokei, Zsolt (2013) -
Electrical resistivity and contact resistance in carbon nanotube vertical interconnects
Chiodarelli, Nicolo; Li, Yunlong; Arstila, Kai; Richard, Olivier; Cott, Daire; Heyns, Marc; De Gendt, Stefan; Groeseneken, Guido; Vereecken, Philippe (2010) -
Growth and integration of high-density CNT for advanced interconnects
Vereecken, Philippe; Cott, Daire; Chiodarelli, Nicolo; Romo Negreira, Ainhoa; Verhulst, Anne; Hantschel, Thomas; Richard, Olivier; Groeseneken, Guido; Heyns, Marc; De Gendt, Stefan (2008) -
Growth and integration of high-density CNT for BEOL interconnects
Romo Negreira, Ainhoa; Cott, Daire; Verhulst, Anne; Cruz Esconjaurequi, Santiago; Chiodarelli, Nicolo; Ek Weis, Johan; Whelan, Caroline; Groeseneken, Guido; Heyns, Marc; De Gendt, Stefan; Vereecken, Philippe (2008) -
Growth mechanism of a hybrid structure consisting of a graphite layer on top of vertical carbon nanotubes
Chiodarelli, Nicolo; Cigang, Xu; Richard, Olivier; Bender, Hugo; Klekachev, Alexander; Cooke, Mike; Heyns, Marc; De Gendt, Stefan; Groeseneken, Guido; Vereecken, Philippe (2012) -
Growth of carbon nanotubes as horizontal interconnects
Zhang, Can; Cott, Daire; Chiodarelli, Nicolo; Vereecken, Philippe; Robertson, john; Whelan, Caroline (2008) -
Integration and electrical characterization of carbon nanotube bundles for application as interconnects
Chiodarelli, Nicolo; Arstila, Kai; Li, Yunlong; Cott, Daire; Richard, Olivier; Heyns, Marc; De Gendt, Stefan; Groeseneken, Guido; Vereecken, Philippe (2010) -
Integration and electrical characterization of carbon nanotube via interconnects
Chiodarelli, Nicolo; Li, Yunlong; Cott, Daire; Mertens, Sofie; Peys, Nick; Heyns, Marc; De Gendt, Stefan; Groeseneken, Guido; Vereecken, Philippe (2011) -
Integration and electrical characterization of carbon nanotubes bundles for application as vertical interconnects
Chiodarelli, Nicolo; Arstila, Kai; Richard, Olivier; Heyns, Marc; De Gendt, Stefan; Groeseneken, Guido; Vereecken, Philippe (2010) -
Integration of carbon nanotubes as future interconnections for sub-32nm technologies
Chiodarelli, Nicolo (2011-05)