Browsing by author "Gao, Weimin"
Now showing items 1-20 of 20
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A fast triple patterning solution with fix guidance
Fang, Weiping; Arikati, Srini; Celingir, Erdem; Hug, Marco A.; De Bisschop, Peter; Mailfert, Julien; Lucas, Kevin; Gao, Weimin (2014) -
Accurate models for EUV simulation and their use for design correction
Lorusso, Gian; Hermans, Jan; Baudemprez, Bart; Hendrickx, Eric; Klostermann, Ulrich K.; Jang, Stephen; Zavyalova, Lena; Sorensen, Jacob; Gao, Weimin; Lucas, Kevin (2009) -
Application of an inverse Mack model for negative tone development simulation
Gao, Weimin; Klostermann, Ulrich; Mülders, Thomas; Schmoeller, Thomas; Demmerle, Wolfgang; De Bisschop, Peter; Bekaert, Joost (2011) -
Binary modeling method to check the sub-resolution assist features (SRAFs) printability
Li, Jianliang; Gao, Weimin; Fan, Yongfa; Xue, Jing; Yan, Qiliang; Lucas, Kevin; De Bisschop, Peter; Melvin III, Lawrence S. (2012) -
Calibration and verification of a stochastic model for EUV resist
Gao, Weimin; Philippou, Alexander; Klostermann, Ulrich; Siebert, Joachim; Philipsen, Vicky; Hendrickx, Eric; Vandeweyer, Tom; Jonckheere, Rik (2012) -
Double patterning OPC and design for 22nm to 16nm device nodes
Lucas, Kevin; Cork, Chris; Miloslavsky, Alex; Luk-Pat, Gerry; Li, Xiaohai; Barnes, Levi; Gao, Weimin; Wiaux, Vincent (2009) -
EDA perspective on manufacturable DPT solutions
Wiaux, Vincent; Gao, Weimin; Lucas, Kevin; Cork, Chris; Luk-Pat, Gerry; Miloslavsky, Alex; Barnes, L.; Painter, B.; Li, X. (2010) -
EUV modeling accruracy and integration requirements for the 16nm node
Zavyalova, Lena; Su, Irene; Jang, Stephen; Cobb, Jonathan; Ward, Brian; Sorensen, Jacob; Song, Hua; Gao, Weimin; Lucas, Kevin; Lorusso, Gian; Hendrickx, Eric (2010) -
Experimental validation of rigorous, 3D profile models for negative-tone develop resists
Gao, Weimin; Klostermann, Ulrich; Kamohara, Itaru; Schmoeller, Thomas; Lucas, Kevin; Demmerle, Wolfgang; De Bisschop, Peter; Mailfert, Julien (2014) -
Fullfield 27nm CD control and modeling
Hendrickx, Eric; Philipsen, Vicky; Hermans, Jan; Lorusso, Gian; Vandenberghe, Geert; Ronse, Kurt; Klosterman, Ulrich; Gao, Weimin; Schmoeller, Thomas (2010) -
Impact of EUV off-axis illumination on full field imaging performance for NXE:3100
Philipsen, Vicky; Hendrickx, Eric; Philippou, Alexander; Klostermann, Ulrich; Gao, Weimin (2011) -
Impact of litho-patterning variations on the electrical performance and variability of advanced interconnects
Ciofi, Ivan; Roussel, Philippe; Baert, Rogier; Kocaay, Deniz; Contino, Antonino; Croes, Kristof; Saad, Yves; Gao, Weimin; Moroz, Victor; Wilson, Chris; Mocuta, Dan; Tokei, Zsolt (2018) -
Intrinisic reliability of local interconnects for N7 and beyond
Croes, Kristof; Lesniewska, Alicja; Wu, Chen; Ciofi, Ivan; Banczerowska, Aga; Briggs, Basoene; Demuynck, Steven; Tokei, Zsolt; Boemmels, Juergen; Saad, Y.; Gao, Weimin (2015) -
Investigation of titanium nitride coating by broadband laser ultrasonic spectroscopy
Gao, Weimin; Glorieux, C.; Lauriks, W.; Thoen, J. (2002) -
Laser ultrasonic study of Lamb waves: determination of the thickness and velocities of a thin plate
Gao, Weimin; Glorieux, Christ; Thoen, Jan (2003) -
Modeling of via resistance for advanced technology nodes
Ciofi, Ivan; Roussel, Philippe; Saad, Yves; Moroz, Victor; Hu, Jojo; Baert, Rogier; Croes, Kristof; Contino, Antonino; Vandersmissen, Kevin; Gao, Weimin; Matagne, Philippe; Badaroglu, Mustafa; Wilson, Chris; Mocuta, Dan; Tokei, Zsolt (2017) -
Patterning process exploration of metal 1 layer in 7nm node with 3D pattering flow simulations
Gao, Weimin; Ciofi, Ivan; Saad, Yves; Matagne, Philippe; Bachman, Michael; Oulmane, Mohamed; Gillijns, Werner; Lucas, Kevin; Demmerle, Wolfgang; Schmoeller, Thomas (2015) -
Repair of natural EUV reticle defects
Jonckheere, Rik; Bret, Tristan; Van Den Heuvel, Dieter; Magana, John F.; Gao, Weimin; Waiblinger, Markus (2011) -
Study of circumferential waves and their interaction with defects on cylindrical shells using line-source laser ultrasonics
Gao, Weimin; Glorieux, C.; Thoen, J. (2002) -
Supersonic radiative transport of electron-hole plasma in semiconductors at room temperature studied by laser ultrasonics
Gao, Weimin; Gusev, V.; Glorieux, C.; Thoen, J.; Borghs, Gustaaf (1997)