Browsing by author "Loewenstein, Lee"

Adsorption of metal ions onto hydrophilic silicon surfaces from aqueous solution: effect of pH

Loewenstein, Lee; Mertens, Paul (1998)

Advanced cleaning for the growth of ultrathin gate oxide

Mertens, Paul; Bearda, Twan; Houssa, Michel; Loewenstein, Lee; Cornelissen, Ingrid; De Gendt, Stefan; Kenis, Karine; Teerlinck, Ivo; Vos, Rita; Meuris, Marc; Heyns, Marc (1999)

Advanced cleaning strategies for ultra-clean silicon surfaces

Heyns, Marc; Bearda, Twan; Cornelissen, Ingrid; De Gendt, Stefan; Loewenstein, Lee; Mertens, Paul; Mertens, Sofie; Meuris, Marc; Schaekers, Marc; Teerlinck, Ivo; Vos, Rita; Wolke, K. (1999)

Advances in understanding wet cleaning technology and the effect of metal contamination

Heyns, Marc; Bearda, Twan; Cornelissen, Ingrid; De Gendt, Stefan; Loewenstein, Lee; Mertens, Paul; Mertens, S.; Meuris, Marc; Schaekers, Marc; Teerlinck, Ivo; Vos, Rita; Wolke, K. (1999)

Behaviour of metallic contaminants during MOS processing

Bearda, Twan; De Gendt, Stefan; Loewenstein, Lee; Knotter, Martin; Mertens, Paul; Heyns, Marc (1998)

Behaviour of metallic contaminants during MOS processing

Bearda, Twan; De Gendt, Stefan; Loewenstein, Lee; Knotter, Martin; Mertens, Paul; Heyns, Marc (1999)

Chemistry of the silicon oxide surface: adsorption from SC1 solutions

Hall, L.; Sees, J.; Hurd, Trace; Schmidt, B.; Bellay, L.; Loewenstein, Lee; Mertens, Paul (1998)

Chemistry of the silicon oxide surface: adsorption from SC1 solutions

Hall, L.; Sees, J.; Hurd, Trace; Schmidt, B.; Bellay, L.; Loewenstein, Lee; Mertens, Paul (1999)

Competititive adsorption of cations onto the silicon surface: the role of the ammonium ion in ammonia-peroxide solution

Loewenstein, Lee; Mertens, Paul (2000)

Competitive adsorption of cations onto the silicon surface. The role of the ammonium ion in ammonia-peroxide solution

Loewenstein, Lee; Mertens, Paul (1999)

Competitive adsorption of cations onto the silicon surface: the role of ammonium ion in APM

Loewenstein, Lee; Mertens, Paul (1999)

Competitive adsorption of metal ions onto hydrophilic silicon surfaces from aqueous solutions

Loewenstein, Lee; Charpin, Florence; Mertens, Paul (1999)

Cost-effective cleaning and high-quality thin gate oxides

Heyns, Marc; Bearda, Twan; Cornelissen, Ingrid; De Gendt, Stefan; Degraeve, Robin; Groeseneken, Guido; Kenens, Conny; Knotter, D. M.; Loewenstein, Lee; Mertens, Paul; Mertens, S.; Meuris, Marc; Nigam, Tanya; Schaekers, Marc; Teerlinck, Ivo; Vandervorst, Wilfried; Vos, Rita; Wolke, K. (1999)

Cost-effective cleaning for advanced Si-processing

Heyns, Marc; Bearda, Twan; Cornelissen, Ingrid; De Gendt, Stefan; Knotter, D. M.; Loewenstein, Lee; Lux, Marcel; Mertens, Paul; Mertens, S.; Meuris, Marc; Schaekers, Marc; Snee, Peter; Teerlinck, Ivo; Vos, Rita (1998)

Developments in cleaning technology for critical layers

Heyns, Marc; Arnauts, Sophia; Bearda, Twan; Claes, M.; Cornelissen, Ingrid; De Gendt, Stefan; Doumen, Geert; Fyen, Wim; Loewenstein, Lee; Lux, Marcel; Mertens, Paul; Mertens, S.; Meuris, Marc; Onsia, Bart; Röhr, Erika; Schaekers, Marc; Teerlinck, Ivo; Van Doorne, Patrick; Van Hoeymissen, Jan; Vereecke, Guy; Vos, Rita; Wolke, K. (2000)