Browsing by author "Jehoul, Christiane"
Now showing items 1-16 of 16
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A year of new mask defectivity insights in imec's EUVL program
Jonckheere, Rik; Van Den Heuvel, Dieter; Baudemprez, Bart; Jehoul, Christiane; Pacco, Antoine (2013) -
Alignment and overlay through opaque metal layers
Blanco, Victor; Canga, Eren; Jehoul, Christiane; Moussa, Alain; Tamaddon, Amir-Hossein; Tabery, C.; Gunjala, G.; Menchtchikov, B.; Zacca, V. G.; Lalbahadoersing, S.; den Boef, A.; Synowicky, R. (2023) -
Characterization of EUV resists for defectivity at 32nm
Montal, Ofir; Dolev, Ido; Rosenzweig, Moshe; Dotan, Kfir; Meshulach, Doron; Adan, Ofer; Levi, Shimon; Cai, Man-Ping; Bencher, Chris; Ngai, Christopher S.; Jehoul, Christiane; Van Den Heuvel, Dieter; Hendrickx, Eric (2011) -
Dependence of the minimal PVD Ta(N) sealing thickness on the porosity of Zirkon low-k films
Iacopi, Francesca; Zistl, C.; Jehoul, Christiane; Tokei, Zsolt; Le, Quoc Toan; Das, Arabinda; Sullivan, C.; Prokopowicz, G.; Gronbeck, D.; Gallagher, M.; Calvert, J.; Maex, Karen (2002) -
EUV process sensitivities and optimizations for track processing
Shite, Hideo; Bradon, Neil; Nafus, Kathleen; Kitano, Junichi; Kosugi, Hitoshi; Hermans, Jan; Hendrickx, Eric; Foubert, Philippe; Gronheid, Roel; Jehoul, Christiane; Van Den Heuvel, Dieter; Goethals, Mieke; Cheng, Shaunee (2010) -
EUV processing investigation on state-of-the-art coater/developer system
Shite, Hideo; Bradon, Neil; Shimoaoki, T.; Kobayashi, S.; Nafus, Kathleen; Kosugi, Hitoshi; Foubert, Philippe; Hermans, Jan; Hendrickx, Eric; Goethals, Mieke; Gronheid, Roel; Jehoul, Christiane (2011) -
EUV resist material performance, progress and process improvements at imec
Goethals, Mieke; Niroomand, Ardavan; Ban, Keundo; Hosokawa, Kohei; Van Roey, Frieda; Pollentier, Ivan; Jehoul, Christiane; Van Den Heuvel, Dieter; Ronse, Kurt (2010) -
Hybrid overlay metrology with CDSEM in a BEOL patterning scheme
Leray, Philippe; Jehoul, Christiane; Inoue, Osamu; Okagawa, Yutaka (2015) -
Metrology of Thin Resist for High NA EUVL
Lorusso, Gian; Beral, Christophe; Bogdanowicz, Janusz; De Simone, Danilo; Hasan, Mahmudul; Jehoul, Christiane; Moussa, Alain; Saib, Mohamed; Zidan, Mohamed; Severi, Joren; Truffert, Vincent; Van Den Heuvel, Dieter; Goldenshtein, Alex; Houchens, Kevin; Santoro, Gaetano; Fischer, Daniel; Muellender, Angelika; Hung, Joey; Koret, Roy; Turovets, Igor; Ausschnitte, Kit; Mack, Chris; Kondo, Tsuyoshi; Shohjoh, Tomoyasu; Ikota, Masami; Charley, Anne-Laure; Leray, Philippe (2022) -
Micro-bridge defects: characterization and root cause analysis
Santoro, Gaetano; Van Den Heuvel, Dieter; Braggin, Jennifer; Rosslee, Craig; Leray, Philippe; Cheng, Shaunee; Jehoul, Christiane; Schreutelkamp, Rob; Hillel, Noam (2010) -
Mitigation of the etch-induced intra-field overlay contribution
van Haren, Richard; Yildirim, Oktay; Mouraille, Orion; van Dijk, Leon; Kumar, Kaushik; Feurprier, Yannick; Jehoul, Christiane; Hermans, Jan (2022) -
Performance of the ASML EUV Alpha demo tool
Hermans, Jan; Hendrickx, Eric; Laidler, David; Jehoul, Christiane; Van Den Heuvel, Dieter; Goethals, Mieke (2010) -
Properties of mesoporous low-k MSSQ based film prepared using macromolecular porogen
Baklanov, Mikhaïl; Jehoul, Christiane; Flannery, C. M.; Moguilnikov, Konstantin; Gore, R.; Gronbeck, D.; Prokopowicz, G.; Sullivan, C.; You, Y.; Pugliano, N.; Gallagher, M. (2002) -
SEM based overlay measurement between via patterns and buried M1 patterns using high voltage SEM
Hasumi, Kazuhisa; Inoue, Osamu; Okagawa, Yutaka; Shao, Chuanyu; Leray, Philippe; Halder, Sandip; Lorusso, Gian; Jehoul, Christiane (2017) -
Single damascene integration of porous zirkonTM version 1 low-k dielectric films
Malhouitre, Stéphane; Jehoul, Christiane; Van Aelst, Joke; Struyf, Herbert; Brongersma, Sywert; Carbonell, Laure; Vos, Ingrid; Beyer, Gerald; Van Hove, Marleen; Gronbeck, D.; Gallagher, M.; Calvert, J.; Maex, Karen (2003-11) -
Towards reduced impact of EUV mask defectivity on wafer
Jonckheere, Rik; Van Den Heuvel, Dieter; Pacco, Antoine; Pollentier, Ivan; Baudemprez, Bart; Jehoul, Christiane; Hermans, Jan; Hendrickx, Eric (2014-07)