Browsing by author "Boeckx, Carolien"
Now showing items 1-12 of 12
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Controlling placement error and dimensional variability in templated DSA
Boeckx, Carolien; Doise, Jan; Bekaert, Joost; Chan, BT; Gronheid, Roel; De Gendt, Stefan (2016) -
EUV patterned templates with grapho-epitaxy DSA at the N5/N7 logic nodes
Gronheid, Roel; Boeckx, Carolien; Doise, Jan; Bekaert, Joost; Karageorgos, Ioannis; Ryckaert, Julien; Chan, BT; Li, Chenxi; Zou, Yi (2016) -
Impact of template shape on CDU and pattern placement for grapho-epitaxy DSA
Boeckx, Carolien; Doise, Jan; Chan, BT; Gronheid, Roel; De Gendt, Stefan (2016) -
Impact of template shape on pattern placement and CDU for grapho-epitaxy DSA
Boeckx, Carolien; Doise, Jan; Bekaert, Joost; Gronheid, Roel; De Gendt, Stefan (2016) -
LCDU and placement improvement of contacts using EUV templated DSA
Boeckx, Carolien; Doise, Jan; Chan, BT; Lorusso, Gian; Sutani, Takumichi; Koshihara, Shunsuke; Ishimoto, Toru; Kato, Takeshi; Rincon Delgadillo, Paulina; De Gendt, Stefan (2018) -
Next generation of decision making software for nanopatterns metrology: application to semiconductor industry
Dervillé, A.; Labrosse, A.; Zimmermann, Y.; Foucher, Johann; Gronheid, Roel; Boeckx, Carolien; Singh, Arjun; Leray, Philippe; Halder, Sandip (2016) -
Opportunities and challenges for DSA in logic and memory
Gronheid, Roel; Singh, Arjun; Doise, Jan; Boeckx, Carolien; Karageorgos, Ioannis; Ryckaert, Julien; Pathangi Sriraman, Hari; Rincon Delgadillo, Paulina; Chan, BT; Vandenberghe, Geert (2016) -
Process optimization and variability improvement of contacts using grapho-epitaxy DSA
Boeckx, Carolien; Doise, Jan; Chan, BT; De Gendt, Stefan; Rincon Delgadillo, Paulina (2017) -
Templated DSA with EUV-exposed pre-patterns
Boeckx, Carolien; Doise, Jan; Chan, BT; Gronheid, Roel; De Gendt, Stefan (2016) -
Towards directed self-assembly for future CMOS scaling: A study on variability of cylindrical patterns
Boeckx, Carolien; Doise, Jan; Fenger, Germain; Cao, Yi; Gronheid, Roel; De Gendt, Stefan (2015) -
Validation of improved compact model in grapho-epitaxy Directed-Self-Assembly (DSA)
Fenger, Germain; Bekaert, Joost; Torres, Andres; Granik, Yuri; Krasnova, Polina; Doise, Jan; Boeckx, Carolien; Vandenberghe, Geert; Gronheid, Roel (2015)