Browsing by author "Knotter, D. M."
Now showing items 1-19 of 19
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A novel resist and post-etch residue removal process using ozonated chemistries
De Gendt, Stefan; Snee, Peter; Cornelissen, Ingrid; Lux, Marcel; Vos, Rita; Mertens, Paul; Knotter, D. M.; Heyns, Marc (1998) -
A novel resist and post-etch residue removal process using ozonated chemistry
De Gendt, Stefan; Snee, Peter; Cornelissen, Ingrid; Lux, Marcel; Vos, Rita; Mertens, Paul; Knotter, D. M.; Meuris, Marc; Heyns, Marc (1999) -
Advanced cleaning and ultra-thin oxide technology
Heyns, Marc; Cornelissen, Ingrid; De Gendt, Stefan; Degraeve, Robin; Knotter, D. M.; Mertens, Paul; Mertens, S.; Meuris, Marc; Nigam, Tanya; Rotondaro, Antonio; Schaekers, Marc; Teerlinck, Ivo; Vos, Rita; Wolke, K. (1998) -
Cost-effective cleaning and high-quality thin gate oxides
Heyns, Marc; Bearda, Twan; Cornelissen, Ingrid; De Gendt, Stefan; Degraeve, Robin; Groeseneken, Guido; Kenens, Conny; Knotter, D. M.; Loewenstein, Lee; Mertens, Paul; Mertens, S.; Meuris, Marc; Nigam, Tanya; Schaekers, Marc; Teerlinck, Ivo; Vandervorst, Wilfried; Vos, Rita; Wolke, K. (1999) -
Cost-effective cleaning for advanced Si-processing
Heyns, Marc; Bearda, Twan; Cornelissen, Ingrid; De Gendt, Stefan; Knotter, D. M.; Loewenstein, Lee; Lux, Marcel; Mertens, Paul; Mertens, S.; Meuris, Marc; Schaekers, Marc; Snee, Peter; Teerlinck, Ivo; Vos, Rita (1998) -
Efficiency of ozonated DI water in removing organic contamination
Kenens, Conny; De Gendt, Stefan; Knotter, D. M.; Loewenstein, Lee; Meuris, Marc; Vandervorst, Wilfried; Heyns, Marc (1998) -
Hydrogen peroxide decomposition in ammonia solutions
Knotter, D. M.; De Gendt, Stefan; Baeyens, Martien; Mertens, Paul; Heyns, Marc (1999) -
Hydrogen peroxide decomposition in ammonia solutions
Knotter, D. M.; De Gendt, Stefan; Baeyens, Martien; Mertens, Paul; Heyns, Marc (1999) -
Hydrogen peroxide decomposition in ammonin solutions
Knotter, D. M.; De Gendt, Stefan; Baeyens, Martien; Mertens, Paul; Heyns, Marc (1998) -
Impact of iron contamination and roughness generated in ammonia hydrogen peroxide mixtures (SC1) on 5nm gate oxides
De Gendt, Stefan; Knotter, D. M.; Kenis, Karine; Mertens, Paul; Heyns, Marc (1998) -
Impact of iron contamination and SC1 generated roughness on 5nm gate oxides
De Gendt, Stefan; Knotter, D. M.; Kenis, Karine; Mertens, Paul; Heyns, Marc (1997) -
Impact of organic contamination on thin gate oxide quality
De Gendt, Stefan; Knotter, D. M.; Kenis, Karine; Depas, Michel; Meuris, Marc; Mertens, Paul; Heyns, Marc (1998) -
In-homogeneous precipitation of iron from SC1 solutions
Knotter, D. M.; De Gendt, Stefan; Mertens, Paul; Heyns, Marc (1997) -
Removal of organic contamination from silicon surfaces
Kenens, Conny; Storm, Wolfgang; Knotter, D. M.; De Gendt, Stefan; Vandervorst, Wilfried; Heyns, Marc (1996) -
Silicon surface metal contamination measurements using grazing-emission XRF spectrometry
De Gendt, Stefan; Kenis, Karine; Baeyens, Martien; Mertens, Paul; Heyns, Marc; Wiener, G.; Kidd, S. J.; Knotter, D. M.; De Bokx, P. K. (1997) -
Silicon surface roughening in an iron contaminated SCl bath
Knotter, D. M.; Mouche, Laurent; Meuris, Marc; Heyns, Marc (1996) -
Silicon surface roughening mechanisms in ammonia hydrogen peroxide mixtures
Knotter, D. M.; De Gendt, Stefan; Mertens, Paul; Heyns, Marc (2000) -
Vapor phase decomposition - droplet collection. Can we improve the collection efficiency for copper contamination?
De Gendt, Stefan; Huber, A.; Onsia, Bart; Arnauts, Sophia; Kenis, Karine; Knotter, D. M.; Mertens, Paul; Heyns, Marc (1999) -
Vapor phase decomposition - droplet collection. Can we improve the collection efficiency for copper contamination?
De Gendt, Stefan; Huber, A.; Onsia, Bart; Arnauts, Sophia; Kenis, Karine; Knotter, D. M.; Mertens, Paul; Heyns, Marc (1998)