Browsing by author "Howard, Dave"
Now showing items 1-15 of 15
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A novel deep submicron elevated source/drain MOSFET
Waite, Andrew Michael; Kubicek, Stefan; Howard, Dave; Caymax, Matty; De Meyer, Kristin; Evans, A. (1998) -
A reliability study of titanium silicide lines using micro-raman spectroscopy and electron microscopy
De Wolf, Ingrid; Howard, Dave; Rasras, Mahmoud; Lauwers, A.; Maex, Karen; Groeseneken, Guido; Maes, Herman (1997) -
A reliability study of titanium silicide lines using micro-Raman spectroscopy and electron microscopy
De Wolf, Ingrid; Howard, Dave; Rasras, Mahmoud; Lauwers, A.; Maex, Karen; Groeseneken, Guido; Maes, Herman (1997) -
An improved technology for elevated source/drain MOSFETS
Waite, Andrew Michael; Howard, Dave; Kubicek, Stefan; Caymax, Matty; De Meyer, Kristin; Evans, A. G. R. (1997) -
Comparative growth kinetics of SiGe in a commercial reduced pressure chemical vapour deposition EPI reactor and anomalies during growth of thin Si layers on SiGe
Caymax, Matty; Loo, Roger; Brijs, Bert; Vandervorst, Wilfried; Howard, Dave; Kimura, K.; Nakajima, K. (1998) -
Experimental validation of mechanical stress models by micro-Raman spectroscopy
De Wolf, Ingrid; Pozzat, G.; Pinardi, Kuntjoro; Howard, Dave; Ignat, M.; Jain, Suresh; Maes, Herman (1996) -
Experimental validation of mechanical stress models by micro-Raman spectroscopy
De Wolf, Ingrid; Pozzat, G.; Pinardi, Kuntjoro; Howard, Dave; Ignat, M.; Jain, Suresh; Maes, Herman (1996) -
Influence of grown-in defects on the optical and electrical properties of Si/Si 1-xGex/Si heterostructures
Loo, Roger; Caymax, Matty; Simoen, Eddy; Howard, Dave; Goryll, M.; Klaes, D.; Vescan, L.; Gravesteijn, Dirk; Petersson, H.; Zhang, X. (1998) -
Local identification and mapping of the C49 and C54 titanium phases in submicron structures by micro-Raman spectroscopy
De Wolf, Ingrid; Howard, Dave; Lauwers, Anne; Maex, Karen; Maes, Herman (1997) -
Mechanical stress in and surrounding CoSi2 and TiSi2 lines
De Wolf, Ingrid; Howard, Dave; Maex, Karen; Maes, Herman (1996) -
On the spatial resolution in analytical electron microscopy
Armigliato, A.; Howard, Dave; Balboni, R.; Frabboni, S.; Caymax, Matty (1998) -
Phase and mechanical stress in and surrounding TiSi2 and CoSi2 lines studied by micro-Raman spectroscopy
De Wolf, Ingrid; Howard, Dave; Maex, Karen; Maes, Herman (1996) -
SEG Si: facet control and selectivity vs. nitride and oxide pattern
Howard, Dave; Caymax, Matty (1997) -
Stress in silicon due to the formation of self aligned poly-CoSi2 lines studied by micro-Raman spectroscopy
Howard, Dave; De Wolf, Ingrid; Bender, Hugo; Maex, Karen (1996) -
TiSi2 and CoSi2: relevant materials issues for deep sub-micron technologies
Maex, Karen; Howard, Dave; De Wolf, Ingrid; Steegen, An (1997)