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Comparative growth kinetics of SiGe in a commercial reduced pressure chemical vapour deposition EPI reactor and anomalies during growth of thin Si layers on SiGe
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1934 since deposited on 2021-09-30
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Acq. date: 2026-07-17
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1934 since deposited on 2021-09-30
1last month
1last week
Acq. date: 2026-07-17
Citations