Authors

Caymax, Matty; Loo, Roger; Brijs, Bert; Vandervorst, Wilfried; Howard, Dave; Kimura, K.; Nakajima, K.

Conference

Epitaxy and Applications of Si-Based Heterostructures

Title

Comparative growth kinetics of SiGe in a commercial reduced pressure chemical vapour deposition EPI reactor and anomalies during growth of thin Si layers on SiGe

Publication type

Proceedings paper

Embargo date

9999-12-31