Browsing by author "Brijs, Bert"
Now showing items 1-20 of 194
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0.5 nm EOT low leakage ALD SrTiO3 on TiN MIM capacitors for DRAM applications
Menou, Nicolas; Wang, Xin Peng; Kaczer, Ben; Polspoel, Wouter; Popovici, Mihaela Ioana; Opsomer, Karl; Pawlak, Malgorzata; Knaepen, W.; Detavernier, C.; Blomberg, T.; Pierreux, D.; Swerts, Johan; Maes, Jan; Favia, Paola; Bender, Hugo; Brijs, Bert; Vandervorst, Wilfried; Van Elshocht, Sven; Wouters, Dirk; Biesemans, Serge; Kittl, Jorge (2008) -
A chemical role of refractory metal caps in Co silicidation: Evidence of SiO2 reduction by Ti cap
Kondoh, Eiichi; Conard, Thierry; Brijs, Bert; Jin, S.; Bender, Hugo; de Potter de ten Broeck, Muriel; Maex, Karen (1999) -
A comparative study of copper drift diffusion in plasma deposited a-SiC : H and Silicon Nitride
Lanckmans, Filip; Gray, William; Brijs, Bert; Maex, Karen (2001) -
A comparative study of copper drift diffusion in plasma deposited A-Sic:H and silicon nitride
Lanckmans, Filip; Gray, William; Brijs, Bert; Maex, Karen (2000) -
A comparative study of the microstructure–dielectric properties of crystalline SrTiO3 ALD films obtained via seed layer approach
Popovici, Mihaela Ioana; Tomida, Kazuyuki; Swerts, Johan; Favia, Paola; Delabie, Annelies; Bender, Hugo; Adelmann, Christoph; Tielens, Hilde; Brijs, Bert; Kaczer, Ben; Pawlak, Malgorzata; Kim, Min-Soo; Altimime, Laith; Van Elshocht, Sven; Kittl, Jorge (2011) -
A fundamental multitechnique of SIMS depth profiling
Vandervorst, Wilfried; Brijs, Bert; Bender, Hugo; Alay, Josep Lluis; De Coster, Walter (1994) -
A mathematical description of atomic layer deposition (ALD), and its application to the nucleation and growth of HfO2 gate dielectric layers
Alam, M.A.; Green, Martin; Ho, M.Y.; Vandervorst, Wilfried; Brijs, Bert; Conard, Thierry; Räisänen, P.I. (2002) -
A new compact eucentric goniometer for RBS, HFS, PIXE, and channeling
Strathman, M.; Brijs, Bert (1998) -
A new compact eucentric goniometer for RBS, HFS, PIXE, and channeling
Strathman, M. D.; Brijs, Bert (1999) -
A study of growth mechanism of TiN and WCN barrier films deposited by atomic layer deposition on different substrates
Satta, Alessandra; Schuhmacher, Jörg; Whelan, Caroline; Vandervorst, Wilfried; Brongersma, Sywert; Beyer, Gerald; Brijs, Bert; Conard, Thierry; Maex, Karen; Vantomme, Andre; Viitanen, M.M.; Brongersma, H.H. (2002) -
A theoretical and experimental study of atomic-layer-deposited films onto porous dielectric substrates
Travaly, Youssef; Schuhmacher, Jorg; Baklanov, Mikhaïl; Giangrandi, Simone; Richard, Olivier; Brijs, Bert; Van Hove, Marleen; Maex, Karen; Abell, Thomas; Somers, K.R.F; Hendrickx, M.F.A; Vanquickenborne, L.G.; Ceulemans, A.; Jonas, A.M (2005-10) -
(A)thermal migration of Ge during junction formation in a-Si layers grown on thin SiGe-buffer layers
Vandervorst, Wilfried; Pawlak, Bartek; Janssens, Tom; Brijs, Bert; Delhougne, Romain; Caymax, Matty; Loo, Roger (2004) -
(A)thermal migration of Ge during junction formation in s-Si grown on thin SiGe-buffer layers
Vandervorst, Wilfried; Pawlak, Bartek; Janssens, Tom; Brijs, Bert; Delhougne, Romain; Caymax, Matty; Loo, Roger (2004) -
Accurate determination of Si sputter yield in the transient region
Deleu, Jeroen; Brijs, Bert; Vandervorst, Wilfried (1999) -
Advanced capabilities and applications of a sputter-RBS system
Brijs, Bert; Deleu, Jeroen; Beyer, Gerald; Vandervorst, Wilfried (1998) -
Advanced capabilities and applications of a sputter-RBS system
Brijs, Bert; Deleu, Jeroen; Beyer, Gerald; Vandervorst, Wilfried (1999) -
Advanced characterization of high-K materials: a nuclear approach
Brijs, Bert; Huyghebaert, Cedric; Nauwelaerts, Sophie; Caymax, Matty; Vandervorst, Wilfried; Nakajima, K.; Kimura, K.; Bergmaier, A.; Dollinger, G.; Lennard, W. N.; Terwagne, G.; Vantomme, Andre (2002) -
Advanced RBS analysis of thin films in micro-electronics
Brijs, Bert; Deleu, Jeroen; Huygebaert, C.; Nauwelaerts, Sophie; Vandervorst, Wilfried; Kimura, K. (2000) -
Advanced RBS analysis of thin films in micro-electronics
Brijs, Bert; Deleu, Jeroen; Huyghebaert, Cedric; Nauwelaerts, Sophie; Nakajima, K.; Kimura, K.; Vandervorst, Wilfried (2001) -
ALCVD hafnium silicates for low power gate stacks
Maes, Jan; Laitinen, O.; De Witte, Hilde; Deweerd, Wim; Delabie, Annelies; Conard, Thierry; Brijs, Bert; Wang, C. - G.; Velasco, H.; Wilk, G. (2004)