Browsing by author "Ohashi, Takeyoshi"
Now showing items 1-12 of 12
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3D measurement of 3D NAND memory hole with CD-SEM and tilted FIB
Ohashi, Takeyoshi; Yamaguchi, Atsuko; Hasumi, Kazuhisa; Ikota, Masami; Tan, Chi Lim; Raymaekers, Tom; Van den Bosch, Geert; Furnemont, Arnaud; Lorusso, Gian (2017) -
Contact inspection and resistance - capacitance measurement of Si nanowire with SEM voltage contrast
Ohashi, Takeyoshi; Hasumi, Kazuhisa; Ikota, Masami; Lorusso, Gian; Mertens, Hans; Horiguchi, Naoto (2019) -
Contact inspection of Si nanowire with SEM voltage contrast
Ohashi, Takeyoshi; Yamaguchi, Atsuko; Hasumi, Kazuhisa; Ikota, Masami; Lorusso, Gian; Horiguchi, Naoto (2018) -
EB metrology of Ge channel gate-all-around FET: buckling evaluation and EB damage assessment
Ohashi, Takeyoshi; Hasumi, Kazuhisa; Ikota, Masami; Lorusso, Gian; Witters, Liesbeth; Horiguchi, Naoto (2020) -
Electron beam metrology for advanced technology nodes
Lorusso, Gian; Horiguchi, Naoto; Boemmels, Juergen; Wilson, Chris; Van den Bosch, Geert; Kar, Gouri Sankar; Ohashi, Takeyoshi; Sutani, Takumichi; Watanabe, Ryota; Takemasa, Yoshikata; Ikota, Masami (2019) -
Enabling CD SEM metrology for 5nm technology node and beyond
Lorusso, Gian; Ohashi, Takeyoshi; Yamaguchi, Astuko; Inoue, Osamu; Sutani, Takumichi; Horiguchi, Naoto; Boemmels, Juergen; Wilson, Chris; Briggs, Basoene; Tan, Chi Lim; Raymaekers, Tom; Delhougne, Romain; Van den Bosch, Geert; Di Piazza, Luca; Kar, Gouri Sankar; Furnemont, Arnaud; Fantini, Andrea; Donadio, Gabriele Luca; Souriau, Laurent; Crotti, Davide; Yasin, Farrukh; Appeltans, Raf; Rao, Siddharth; De Simone, Danilo; Rincon Delgadillo, Paulina; Leray, Philippe; Charley, Anne-Laure; Zhou, Daisy; Veloso, Anabela; Collaert, Nadine; Hasumi, Kazuhisa; Koshihara, Shunsuke; Ikota, Masami; Okagawa, Yutaka; Ishimoto, Toru (2017) -
Line width roughness accuracy analysis during pattern transfer in self-aligned quadruple patterning process
Lorusso, Gian; Inoue, Osamu; Ohashi, Takeyoshi; Altamirano Sanchez, Efrain; Constantoudis, Vassilios; Koshihara, Shunsuke (2016) -
Precise measurement of thin film thickness in 3D-NAND device with CD-SEM
Ohashi, Takeyoshi; Atsuko, Yamaguchi; Kobayashi, Takashi; Inoue, Osamu; Hasumi, Kazuhisa; Ikota, Masami; Tan, Chi Lim; Van den Bosch, Geert; Lorusso, Gian; Furnemont, Arnaud (2016) -
Precise measurement of thin-film thickness in 3D-NAND device with CD-SEM
Ohashi, Takeyoshi; Yamaguchi, Atsuko; Hasumi, Kazuhisa; Ikota, Masami; Lorusso, Gian; Tan, Chi Lim; Van den Bosch, Geert; Furnemont, Arnaud (2018) -
SEM Inspection of Nanowire Devices: Contact inspection, Resistance and Capacitance Measurement and Buckling Evaluation
Ohashi, Takeyoshi; Hasumi, Kazuhisa; Masami, Ikota; Lorusso, Gian; Mertens, Hans; Witters, Liesbeth; Horiguchi, Naoto (2019) -
Variability study with CD-SEM metrology for STT-MRAM: Correlation analysis between physical dimensions and electrical property of the memory element
Ohashi, Takeyoshi; Yamaguchi, Atusko; Hasumi, Kazuhisa; Inoue, Osamu; Ikata, Masami; Lorusso, Gian; Donadio, Gabriele Luca; Yasin, Farrukh; Rao, Siddharth; Kar, Gouri Sankar (2017) -
Variability study with CD-SEM metrology for STT-MRAM: correlation analysis between physical dimensions and electrical property of the memory element
Ohashi, Takeyoshi; Yamaguchi, Atsuko; Hasumi, Kazuhisa; Inoue, Osamu; Ikota, Masami; Lorusso, Gian; Donadio, Gabriele Luca; Yasin, Farrukh; Rao, Siddharth; Kar, Gouri Sankar (2017)