Browsing by author "Kambham, Ajay Kumar"

3D site specific sample preparation and analysis of 3D devices (Finfets) by atom probe tomography

Kambham, Ajay Kumar; Kumar, Arul; Gilbert, Matthieu; Vandervorst, Wilfried (2012)

3D site specific sample preparation and analysis of 3D devices (FinFETs) by atom probe tomography

Vandervorst, Wilfried; Kambham, Ajay Kumar; Kumar, Arul; Gilbert, Matthieu (2013)

3D-Atomprobe : facts, artifacts and applications in semiconductors

Vandervorst, Wilfried; Koelling, Sebastian; Gilbert, Matthieu; Kambham, Ajay Kumar (2010)

3D-carrier profiling in FinFETs using scanning spreading resistance microscopy

Mody, Jay; Zschaetzsch, Gerd; Koelling, Sebastian; De Keersgieter, An; Eneman, Geert; Kambham, Ajay Kumar; Drijbooms, Chris; Schulze, Andreas; Chiarella, Thomas; Horiguchi, Naoto; Hoffmann, Thomas; Eyben, Pierre; Vandervorst, Wilfried (2011)

Application of atom probe tomography to epitaxial layers

Kumar, Arul; Gilbert, Matthieu; Kambham, Ajay Kumar; Gencarelli, Federica; Loo, Roger; Vandervorst, Wilfried (2013)

Atom probe analysis of a 3D-finfet with high-k metal gate

Gilbert, Matthieu; Vandervorst, Wilfried; Koelling, Sebastian; Kambham, Ajay Kumar (2011)

Atom probe for FinFET dopant characterization

Kambham, Ajay Kumar; Mody, Jay; Gilbert, Matthieu; Koelling, Sebastian; Vandervorst, Wilfried (2010)

Atom probe tomography for 3D-dopant analysis in FinFET devices

Kambham, Ajay Kumar; Zschaetzsch, Gerd; Sasaki, Yuichiro; Togo, Mitsuhiro; Horiguchi, Naoto; Mody, J.; Florakis, Antonios; Gajula, D.R.; Kumar, Arul; Gilbert, Matthieu; Vandervorst, Wilfried (2012)

Atom probe tomography for advanced semiconductor metrology

Gilbert, Matthieu; Kambham, Ajay Kumar; Kumar, Arul; Vandervorst, Wilfried (2012)

Atom-probe for arsenic implant doped FinFET characterization

Kambham, Ajay Kumar; Kumar, Arul; Gilbert, Matthieu; Vandervorst, Wilfried (2012)

Atom-probe-tomographic studies on silicon-based semiconductor devices

Inoue, Koji; Kambham, Ajay Kumar; Mangelinck, Dominique; Lawrence, Dan; Kelly, Thomas F. (2012)

Atomic insight into relaxation mechanism of Ge(1-x)Sn(x) using atom probe tomography

Kumar, Arul; Kambham, Ajay Kumar; Gilbert, Matthieu; Vandervorst, Wilfried (2012)

Atomic insight of Ge(1-x)Sn(x) using atom probe tomography

Kumar, Arul; Gencarelli, Federica; Vincent, Benjamin; Kambham, Ajay Kumar; Gilbert, Matthieu; Vandervorst, Wilfried (2012)

Atomic scale characterization of 3D structures (FinFETs) with atom probe tomography

Kambham, Ajay Kumar (2014-03)

Counting dopants/atoms in 2D/3D nanoscale structures

Vandervorst, Wilfried; Eyben, Pierre; Schulze, Andreas; Kambham, Ajay Kumar; Koelling, Sebastian; Gilbert, Matthieu (2010)

Device architectures and their integration challenges for 1x nm node: FinFETs and high mobility channel

Horiguchi, Naoto; Zschaetzsch, Gerd; Sasaki, Yuichiro; Kambham, Ajay Kumar; Togo, Mitsuhiro; Cho, Moon Ju; Ragnarsson, Lars-Ake; Hellings, Geert; Mitard, Jerome; Franco, Jacopo; Eneman, Geert; Witters, Liesbeth; Waldron, Niamh; Lin, Dennis; Pantisano, Luigi; Collaert, Nadine; Vandervorst, Wilfried; Thean, Aaron (2012-09)

Dopant and carrier profiling for 3D-device architectures

Mody, Jay; Kambham, Ajay Kumar; Zschaetzsch, Gerd; Chiarella, Thomas; Collaert, Nadine; Witters, Liesbeth; Eyben, Pierre; Gilbert, Matthieu; Koelling, Sebastian; Schulze, Andreas; Hoffmann, Thomas Y.; Vandervorst, Wilfried (2011)

Dopant and carrier profiling in FinFET-based devices with sub-nanometer resolution

Mody, Jay; Kambham, Ajay Kumar; Zschaetzsch, Gerd; Schatzer, Philipp; Chiarella, Thomas; Collaert, Nadine; Witters, Liesbeth; Jurczak, Gosia; Horiguchi, Naoto; Gilbert, Matthieu; Eyben, Pierre; Koelling, Sebastian; Schulze, Andreas; Hoffmann, Thomas Y.; Vandervorst, Wilfried (2010)

Dopant/carrier profiling for 3D-structures

Vandervorst, Wilfried; Schulze, Andreas; Kambham, Ajay Kumar; Mody, Jay; Gilbert, Matthieu; Eyben, Pierre (2014)

Dopant/carrier profiling in nanostructures

Vandervorst, Wilfried; Eyben, Pierre; Schulze, Andreas; Mody, Jay; Koelling, Sebastian; Kambham, Ajay Kumar; Gilbert, Matthieu (2010)