Browsing by author "Dollinger, G."
Now showing items 1-15 of 15
-
Advanced characterization of high-K materials: a nuclear approach
Brijs, Bert; Huyghebaert, Cedric; Nauwelaerts, Sophie; Caymax, Matty; Vandervorst, Wilfried; Nakajima, K.; Kimura, K.; Bergmaier, A.; Dollinger, G.; Lennard, W. N.; Terwagne, G.; Vantomme, Andre (2002) -
An (un)solvable problem in SIMS: B-interfacial profiling
Vandervorst, Wilfried; Janssens, Tom; Loo, Roger; Caymax, Matty; Peytier, Ivan; Lindsay, Richard; Fruehauf, Jens; Bergmaier, A.; Dollinger, G. (2003) -
Assessment of the near-surface profiling capabilities of SIMS
Vandervorst, Wilfried; Janssens, Tom; Fruehauf, Jens; Ross, I.M.; Cullis, A.; Vandenberg, J.A.; Bergmaier, A.; Dollinger, G. (2003) -
Characterization of the B and As pile-up at the Si-SiO2 interface
Fruehauf, Jens; Lindsay, Richard; Vandervorst, Wilfried; Maex, Karen; Bergmaier, A.; Dollinger, G.; Koch, F. (2003) -
Characterization of ultra thin oxynitrides, a general approach
Brijs, Bert; Deleu, Jeroen; Conard, Thierry; De Witte, Hilde; Vandervorst, Wilfried; Nakajima, K.; Kimura, K.; Genchev, I.; Bergmaier, A.; Goergens, I.; Neumaier, P.; Dollinger, G.; Dobeli, M. (1999) -
Characterization of ultra thin oxynitrides: a general approach
Brijs, Bert; Deleu, Jeroen; Conard, Thierry; De Witte, Hilde; Vandervorst, Wilfried; Nakajima, K.; Kimura, K.; Genchev, I.; Bermaier, A.; Goergens, L.; Neumaier, P.; Dollinger, G.; Döbeli, M. (2000) -
Errors in near-surface and interfacial profiling of boron and arsenic
Vandervorst, Wilfried; Janssens, Tom; Brijs, Bert; Conard, Thierry; Huyghebaert, Cedric; Fruhauf, J.; Bergmaier, A.; Dollinger, G.; Buyuklimanli, T.; Vanden Berg, J.A.; Kimura, K. (2004-06) -
Errors in near-surface and interfacial profiling of boron and arsenic
Vandervorst, Wilfried; Janssens, Tom; Brijs, Bert; Conard, Thierry; Huyghebaert, Cedric; Frühauf, J.; Bergmaier, A.; Dollinger, G.; Buyuklimanli, T.; Vandenberg, J.A.; Kimura, K. (2004-05) -
High resolution depth profiling of future gate dielectric materials
Bergmaier, A.; Dollinger, G.; Görgens, L.; Neumaier, P.; Bender, Hugo; Brijs, Bert; Conard, Thierry; Houssiau, L. (2003) -
High resolution elastic recoil detection
Dollinger, G.; Bergmaier, A.; Goergens, L.; Neumaier, P.; Vandervorst, Wilfried; Jakschik, S. (2004) -
Near-surface B/As profiling with SIMS: (in)solvable problems?
Vandervorst, Wilfried; Geenen, Luc; Huyghebaert, Cedric; Fruehauf, Jens; Bergmaier, A.; Dollinger, G.; Vandenberg, J.A. (2003) -
Physical characterization of mixed HfAlOx layers by complementary analysis techniques
Bender, Hugo; Conard, Thierry; Richard, Olivier; Brijs, Bert; Petry, Jasmine; Vandervorst, Wilfried; Defranoux, C.; Boher, P.; Rochat, N.; Wyon, C.; Mack, P.; Wolstenholme, J.; Vitchev, E.; Houssiau, L.; Pireaux, J-J.; Bergmaier, A.; Dollinger, G. (2004) -
Physical characterization of thin HfO2 layers by the combined analysis with complementary techniques
Bender, Hugo; Conard, Thierry; Richard, Olivier; Brijs, Bert; Petry, Jasmine; Vandervorst, Wilfried; Defranoux, C.; Boher, P.; Rochat, N.; Wyon, C.; Mack, P.; Wolstenholme, J.; Vitchev, R.; Houssiau, L.; Pireaux, J.J.; Bergmaier, A.; Dollinger, G. (2003) -
Quantification and depth profiling of a ZrO2 (2nm)/A1203 (1nm) layer with NRA, RBS, HRBS, HERD
Brijs, Bert; Huyghebaert, Cedric; Nauwelaerts, Sophie; Caymax, Matty; Vandervorst, Wilfried; Nakajima, K.; Kimura, K.; Bergmaier, A.; Dollinger, G.; Lennard, W. N.; Terwagne, G.; Vantomme, Andre (2001) -
Recent developments in nuclear methods in support of semiconductor characterization
Brijs, Bert; Bender, Hugo; Huyghebaert, Cedric; Janssens, Tom; Vandervorst, Wilfried; Nakajima, K.; Kimura, K.; Bergmaier, A.; Dollinger, G.; van den Berg, J.A. (2003)