Browsing by author "Reading, M.A."
Now showing items 1-8 of 8
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A comparative X-ray photoelectron spectroscopy and medium-energy ion-scattering study of ultra-thin, Hf-based high-k films
Sygellou, L; Ladas, S; Reading, M.A.; van den Berg, J.A.; Conard, Thierry; De Gendt, Stefan (2010-03) -
Comparison of electrical measurements with structural analysis of thin high-k hafnium-based films
Hourdakis, E.; Theodoropoulou, M.; Nassiopoulou, A.G.; Parisini, A.; Reading, M.A.; van den Berg, J.A.; Conard, Thierry; De Gendt, Stefan (2009) -
Comparison of electrical measurements with structural analysis of thin high-k hafnium-based films
Hourdakis, E.; Theodoropoulou, M.; Nassiopoulou, A.G.; Parisini, A.; Reading, M.A.; van den Berg, J.A.; Conard, Thierry; De Gendt, Stefan (2009) -
High depth resolution depth profile analysis of ultra thin high-k Hf based films using MEIS compared with XTEM, XRF, SE and XPS
van den Berg, J.A.; Reading, M.A.; Parisini, A.; Kolbe, M.; Beckhoff, B.; Ladas, S.; Petrik, P.; Bailey, P.; Noakes, T.; Conard, Thierry; De Gendt, Stefan (2009) -
High resolution medium energy ion scattering analysis for the quantitative depth profiling of ultra thin high-k Hf based films
Van den berg, J.; Reading, M.A.; Armour, D.G.; Bailey, P.; Noakes, T.; Conard, Thierry; De Gendt, Stefan (2009) -
High resolution, quantitative depth profiling analysis of nm thin hgh-k dielectriclayers using medium energy ion scattering (MEIS)
van den Berg, J.A.; Reading, M.A.; Armour, D.G>; Bailey, P.; Noakes, T.C.Q.; Conard, Thierry; De Gendt, Stefan (2009) -
Nanolayer characterisation by reference-free X-ray fluorescence analysis with synchrotron radiation
Kolbe, M.; Beckhoff, B.; Krumrey, M.; Reading, M.A.; van den Berg, J.A.; Conard, Thierry; De Gendt, Stefan (2009) -
TiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFM
Barozzi, Mario; Iacob, E; van den Berg, J.A.; Reading, M.A.; Adelmann, Christoph; Popovici, Mihaela Ioana; Tielens, Hilde; Bersani, M. (2011)