Browsing by author "Trenkler, Thomas"
Now showing items 1-20 of 43
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2D profiling with atomic force microscopy
Trenkler, Thomas; De Wolf, Peter; Stephenson, Robert; Clarysse, Trudo; Hantschel, Thomas; Vandervorst, Wilfried (1999) -
Carrier Profile Determination in Device Structures using AFM-Based Methods
Vandervorst, Wilfried; De Wolf, Peter; Clarysse, Trudo; Trenkler, Thomas; Hellemans, L.; Snauwaerts, Jan; Raineri, Vito (1995) -
Characterization of conductive probes for atomic force microscopy
Trenkler, Thomas; Hantschel, Thomas; Vandervorst, Wilfried; Hellemans, L.; Kulisch, W.; Oesterschulze, E.; Niedermann, P.; Sulzbach, T. (1999) -
Characterization of silicon cantilevers with integrated pyramidal tips in atomic force microscopy
Hantschel, Thomas; Stephenson, Robert; Trenkler, Thomas; De Wolf, Peter; Vandervorst, Wilfried (1999) -
Diamond tips and cantilevers for the characterization of semiconductor devices
Malavé, A.; Oesterschulze, E.; Kulisch, W.; Trenkler, Thomas; Hantschel, Thomas; Vandervorst, Wilfried (1999) -
Dopant/carrier profiling for ULSI
Vandervorst, Wilfried; Clarysse, Trudo; De Wolf, Peter; Trenkler, Thomas; Hantschel, Thomas; Stephenson, Robert (1998) -
Electrical characterization of submicrometer silicon devices by cross-sectional contact-mode AFM
De Wolf, Peter; Trenkler, Thomas; Clarysse, Trudo; Caymax, Matty; Vandervorst, Wilfried; Snauwaert, J.J.; Hellemans, L. (1996) -
Electrical scanning probe techniques in semiconductor research
Trenkler, Thomas; De Wolf, Peter; Eyben, Pierre; Haegeman, Bart; Stephenson, Robert; Hantschel, Thomas; Vandervorst, Wilfried (1999) -
Epitaxial staircase structure for the calibration of electrical characterisation techniques
Clarysse, Trudo; Caymax, Matty; De Wolf, Peter; Trenkler, Thomas; Vandervorst, Wilfried; McMurray, J. S.; Kim, J.; Williams, C. C.; Clark, J G.; Neubauer, G. (1997) -
Epitaxial staircase structure for the calibration of electrical characterization techniques
Clarysse, Trudo; Caymax, Matty; De Wolf, Peter; Trenkler, Thomas; Vandervorst, Wilfried; McMurray, J. S.; Kim, J.; Williams, C. C.; Clark, J. G.; Neubauer, G. (1998) -
Evaluating probes for "electrical" atomic force microscopy
Trenkler, Thomas; Hantschel, Thomas; Stephenson, Robert; De Wolf, Peter; Hellemans, L.; Vandervorst, Wilfried; Malavé, A.; Büchel, D.; Oesterschulze, E.; Kulisch, W.; Niedermann, P.; Sulzbach, T.; Ohlsson, O. (1999) -
Evaluating probes for "electrical" atomic force microscopy
Trenkler, Thomas; Hantschel, Thomas; Stephenson, Robert; De Wolf, Peter; Vandervorst, Wilfried; Hellemans, L.; Malavé, A.; Büchel, D.; Oesterschulze, E.; Kulisch, W.; Niedermann, P.; Sulzbach, T.; Ohlsson, O. (2000) -
Fabrication and use of metal tip and tip-on-tip probes for AFM-based device analysis
Hantschel, Thomas; De Wolf, Peter; Trenkler, Thomas; Stephenson, Robert; Vandervorst, Wilfried (1998) -
High resolution dopant/carrier profiling for deep submicron technologies
Vandervorst, Wilfried; Clarysse, Trudo; De Wolf, Peter; Eyben, Pierre; Haegeman, Bart; Xu, Mingwei; Trenkler, Thomas; Hantschel, Thomas; Stephenson, Robert; Conard, Thierry; De Witte, Hilde (1999) -
High Temperature EPMA in Combination with Depth Profiling and Scanning Techniques for Investigation pf WTi(N)-Cu Systems
Möller, A.; Trenkler, Thomas; Wenzel, C.; Drescher, K. (1995) -
Highly conductive diamond probes for scanning spreading resistance microscopy
Hantschel, Thomas; Niedermann, P.; Trenkler, Thomas; Vandervorst, Wilfried (2000) -
Improved understanding and characterisation of rapid thermal oxides
Horzel, Jörg; Storm, Wolfgang; Trenkler, Thomas; Sivoththaman, Sivanarayanamoorthy; Nijs, Johan; Mertens, Robert; Adriaenssens, G. (1996) -
Local potential measurements in silicon devices using atomic force microscopy with conductive tips
Trenkler, Thomas; De Wolf, Peter; Snauwaerts, Jan; Qamhieh, Z.; Vandervorst, Wilfried; Hellemans, L. (1995) -
Material transport in copper-solder-micro-contacts under electric current
Möller, A.; Trenkler, Thomas; Gehring, T.; Meusel, E. (1995) -
Nanometer scale characterization of deep submicron devices
Vandervorst, Wilfried; Clarysse, Trudo; Duhayon, Natasja; Eyben, Pierre; Hantschel, Thomas; Trenkler, Thomas; Xu, Mingwei (2000)