Browsing by author "De Smedt, Frank"
Now showing items 1-20 of 23
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A detailed study on the growth of thin oxide layers on silicon using ozonated solutions
De Smedt, Frank; Vinckier, Chris; Cornelissen, Ingrid; De Gendt, Stefan; Heyns, Marc (2000) -
A mechanism for the silicon oxide growth by ozonated solutions
De Smedt, Frank; Vinckier, Chris; De Gendt, Stefan; Cornelissen, Ingrid; Heyns, Marc (1999) -
A mechanism for the silicon oxide growth by ozonated solutions
De Smedt, Frank; Vinckier, Chris; De Gendt, Stefan; Cornelissen, Ingrid; Heyns, Marc (2000) -
A wet chemical method for the determination of thickness of SiO2 layers below the nanometer level
De Smedt, Frank; Stevens, G.; De Gendt, Stefan; Cornelissen, Ingrid; Arnauts, Sophia; Meuris, Marc; Heyns, Marc; Vinckier, Chris (1999) -
Can we increase the efficiency of organic contamination removal by ozone/di-water processes by using additives
De Smedt, Frank; Vankerckhoven, Hans; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2002) -
Can we increase the efficiency of organic contamination removal by ozone/Di-water processes by using additives?
De Smedt, Frank; Vankerckhoven, H.; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2003) -
Determination of degradation products in O3/DI processes
Vankerckhoven, Hans; De Smedt, Frank; Van Herp, Bart; Claes, M.; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2001) -
Determination of photoresist degradation products in O3/DI water processing
Vankerckhoven, Hans; De Smedt, Frank; Van Herp, Bart; Claes, Martine; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2001) -
Effect of additives on the removal efficiency of photoresist by ozone/Di-water processes; experimental study
Vankerckhoven, H.; De Smedt, Frank; Claes, Martine; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2003) -
Materials compatibility and organic build-up during ozone-based cleanings of semiconductor devices
De Smedt, Frank; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2001) -
On the application of a thin ozone based wet chemical oxide as an interface for ALD high-k deposition
Onsia, Bart; Caymax, Matty; Conard, Thierry; De Gendt, Stefan; De Smedt, Frank; Delabie, Annelies; Gottschalk, C.; Green, M.; Heyns, Marc; Lin, S.; Mertens, Paul; Tsai, Wilman; Vinckier, Chris (2004) -
On the application of a thin ozone based wet chemical oxide as an interface for ALD high-k deposition
Onsia, Bart; Caymax, Matty; Conard, Thierry; De Gendt, Stefan; De Smedt, Frank; Delabie, Annelies; Gottschalk, C.; Green, M.; Heyns, Marc; Lin, S.; Mertens, Paul; Tsai, Wilman; Vinckier, Chris (2005) -
Photoresist stripping by Ozone/water processes: effect of additives
Vankerckhoven, Hans; De Smedt, Frank; Vandersmissen, Kevin; Claes, Martine; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2005) -
Removal of photoresist by O3DI water processes: determination of degradation products
Vankerckhoven, Hans; De Smedt, Frank; Vinckier, Chris; Van Herp, Bart; Claes, M.; De Gendt, Stefan; Heyns, Marc (2001) -
Removal of photoresist by O3DI water processes: determination of degradation products
Vankerckhoven, Hans; De Smedt, Frank; Vinckier, Chris; Van Herp, Bart; Claes, Martine; De Gendt, Stefan; Heyns, Marc (2002) -
Surface characterization after different wet chemical cleans
Claes, Martine; Röhr, Erika; Conard, Thierry; De Smedt, Frank; De Gendt, Stefan; Storm, Wolfgang; Bauer, T.; Mertens, Paul; Heyns, Marc (2001) -
The application of ozone in semiconductor cleaning processes - the solubility issue
De Smedt, Frank; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2001) -
The increasing importance of the use of ozone in micro-electronics industry
De Smedt, Frank; De Gendt, Stefan; Claes, M.; Heyns, Marc; Vankerckhoven, Hans; Vinckier, Chris (2001) -
The ozone solubility and its decay in aqueous solutions: crucial issues in ozonated chemistries for semiconductor cleaning
De Smedt, Frank; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2001) -
The removal of organic contamination by O3/DI water processes: a theoretical study
De Smedt, Frank; Vankerckhoven, Hans; Vinckier, Chris; De Gendt, Stefan; Claes, M.; Heyns, Marc (2001)