Browsing by author "Alvarez, David"
Now showing items 1-20 of 31
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Analysis and optimisation of the 2D-dopant profile in a 90 nm CMOS technology using scanning spreading resistance microscopy
Eyben, Pierre; Alvarez, David; Jurczak, Gosia; Rooyackers, Rita; De Keersgieter, An; Augendre, Emmanuel; Vandervorst, Wilfried (2003) -
Analysis of the two-dimensional-dopant profile in a 90 nm complementary metal-oxide-semiconductor technology using scanning spreading resistance microscopy
Eyben, Pierre; Alvarez, David; Jurczak, Gosia; Rooyackers, Rita; De Keersgieter, An; Augendre, Emmanuel; Vandervorst, Wilfried (2004-01) -
Assessing the performance of two-dimensional dopant profiling techniques
Duhayon, Natasja; Eyben, Pierre; Fouchier, Marc; Clarysse, Trudo; Vandervorst, Wilfried; Alvarez, David; Schoemann, S.; Ciappa, M.; Stangoni, M.; Fichtner, W.; Formanek, P.; Raineri, V.; Giannazzo, F.; Goghero, D.; Rosenwaks, Y.; Shikler, R.; Saraf, S.; Sadewasser, S.; Barreau, N.; Glatzel, T.; Verheijen, M.; Mentink, S.A.M.; von Sprekelsen, M.; Maltezopoulos, T.; Wiesendanger, R.; Hellemans, L. (2003) -
Assessing the resolution limits of scanning spreading resistance microscopy and scanning capacitance microscopy
Eyben, Pierre; Duhayon, Natasja; Alvarez, David; Vandervorst, Wilfried (2003) -
Assessing the resolution limits of scanning spreading resistance microscopy and scanning capacitance microscopy
Eyben, Pierre; Duhayon, Natasja; Alvarez, David; Vandervorst, Wilfried (2003) -
Characterization of ultra-thin SOI transistors down to 20nm gate length regime with scanning spreading resistance microscopy (SSRM)
Hartwich, J.; Alvarez, David; Dreeskornfeld, L.; Specht, M.; Vandervorst, Wilfried; Risch, Lothar (2003) -
Characterization of vertical resurf diodes using scanning probe microsopy
Duhayon, Natasja; Xu, Mingwei; Alvarez, David; Eyben, Pierre; Vandervorst, Wilfried; Hellemans, L.; Rochefort, Christelle; Van Dalen, Rob (2002) -
Fabrication and characterization of full diamond tips for scanning-spreading resistance microscopy
Alvarez, David; Fouchier, Marc; Kretz, J.; Hartwich, J.; Schoemann, S.; Vandervorst, Wilfried (2004-06) -
Fabrication of conductive AFM probes and their use in microelectronics
Fouchier, Marc; Alvarez, David; Eyben, Pierre; Duhayon, Natasja; Petry, Jasmine; Drijbooms, Chris (2003) -
Fabrication of conductive atomic force microscope probes and their evaluation for carrier mapping
Fouchier, Marc; Eyben, Pierre; Alvarez, David; Duhayon, Natasja; Xu, Mingwei; Brongersma, Sywert; Lisoni, Judit; Vandervorst, Wilfried (2003-05) -
High resolution 2D scanning spreading resistance microscopy (SSRM) of thin film SOI MOSFETs with ultra short effective channel length
Hartwich, J.; Alvarez, David; Dreeskornfeld, L.; Hoffman, F.; Kretz, J.; Landgraf, E.; Luyken, R.J.; Rösner, W.; Schulz, T.; Specht, M.; Städele, M.; Vandervorst, Wilfried; Risch, Lothar (2003) -
High resolution scanning spreading resistance microscopy
Alvarez, David; Fouchier, Marc; Vandervorst, Wilfried (2002) -
High resolution scanning spreading resistance microscopy of fully depleted silicon-on-insulator devices and double-gate transistors
Alvarez, David; Fouchier, Marc; Hartwich, J.; Eyben, Pierre; Vandervorst, Wilfried (2003) -
High resolution two-dimensional carrier profiling on sub-100nm silicon nano-devices using scanning spreading resistance microscopy
Eyben, Pierre; Fukutome, H.; Alvarez, David; Vandervorst, Wilfried (2004) -
New trends in the application of scanning probe techniques in failure analysis
Schweinbock, T.; Schömann, S.; Alvarez, David; Buzzo, M.; Frammelsberger, W.; Breitschopf, P.; Benstetter, G. (2004) -
Overview of 2D profiling in Imec
Duhayon, Natasja; Eyben, Pierre; Alvarez, David; Fouchier, Marc; Blasco, X.; Clarysse, Trudo; Vandervorst, Wilfried; Hellemans, L. (2003) -
Probing local electrical properties in semiconductors with nanometer resolution
Vandervorst, Wilfried; Duhayon, Natasja; Eyben, Pierre; Alvarez, David; Xu, Mingwei; Fouchier, Marc; Clarysse, Trudo (2003) -
Probing semiconductor technology and devices with scanning spreading resistance microscopy
Eyben, Pierre; Vandervorst, Wilfried; Alvarez, David; Xu, Mingwei; Fouchier, Marc (2007) -
Quantitative 2D-carrier profiling in semiconductors with sub-nm spatial resolution using SSRM
Vandervorst, Wilfried; Eyben, Pierre; Duhayon, Natasja; Alvarez, David; Fouchier, Marc; Xu, Mingwei (2003) -
Recent progress and insights in two-dimensional carrier profiling using scanning spreading resistance microscopy
Eyben, Pierre; Alvarez, David; Clarysse, Trudo; Vandervorst, Wilfried (2003)