Browsing by author "Schwitters, M."
Now showing items 1-9 of 9
-
A highly reliable 3-dimensional integrated SBT ferroelectric capacitor enabling FeRAM scaling
Goux, Ludovic; Russo, G.; Menou, N.; Lisoni, Judit; Schwitters, M.; Paraschiv, Vasile; Maes, David; Artoni, C.; Corallo, G.; Haspeslagh, Luc; Wouters, Dirk; Zambrano, R.; Muller, Ch. (2005-04) -
Ferroelectric properties and reliability of sidewall SBT in integrated 3D FeCAPs
Goux, Ludovic; Menou, N.; Lisoni, Judit; Schwitters, M.; Paraschiv, Vasile; Maes, David; Zhen, X.; Kaczer, Ben; Haspeslagh, Luc; Wouters, Dirk; Muller, C.; Caputa, C.; Zambrano, R. (2004) -
Influence of metal and SBT dry-etch on FeCAP properties and role of recovery anneals
Goux, Ludovic; Paraschiv, Vasile; Boullart, Werner; Lisoni, Judit; Schwitters, M.; Maes, David; Haspeslagh, Luc; Wouters, Dirk; Caputa, Concetta; Casella, P.; Zambrano, R.; Vecchio, G.; Monchoix, H. (2004) -
Influence of top electrode deposition conditions on the reliability of integrated SBT ferroelectric capacitors
Goux, Ludovic; Xu, Zhen; Paraschiv, Vasile; Schwitters, M.; Lisoni, Judit; Maes, David; Haspeslagh, Luc; Groeseneken, Guido; Zambrano, R.; Wouters, Dirk (2004) -
Integration of MOCVD SBT stacked ferroelectric capacitors in a 0.35 μm CMOS technology
Maes, David; Everaert, Jean-Luc; Goux, Ludovic; Lisoni, Judit; Paraschiv, Vasile; Schwitters, M.; Haspeslagh, Luc; Wouters, Dirk; Artoni, C.; Caputa, Concetta; Casella, P.; Corallo, G.; Russo, G.; Zambrano, R.; Monchoix, H.; Van Autryve, Luc (2004) -
Microstructural characterization of side walls in SBT 3D capacitors
Menou, N.; Goux, Ludovic; Lisoni, Judit; Schwitters, M.; Turquat, Ch.; Madigou, V.; Hodeau, J-L.; Muller, Ch.; Wouters, Dirk (2004) -
Process and substrate effects on the properties of MOCVD-deposited SrBi2Ta2O9 films
Schwitters, M.; Everaert, Jean-Luc; Lisoni, Judit; Paraschiv, Vasile; Goux, Ludovic; Wouters, Dirk; Monchoix, H.; Caputa, Concetta; Zambrano, R. (2004) -
Side walls contribution in integrated 3D SBT-based capacitors: electrical and microstructural point of view
Menou, N.; Madigou, V.; Turquat, Ch.; Goguenheim, D.; Muller, Ch.; Goux, Ludovic; Lisoni, Judit; Schwitters, M.; Wouters, Dirk; Barret, R.; Hodeau, J-L. (2004) -
Stress evolution in integrated SrBi2Ta2O9 ferroelectric layers
Lisoni, Judit; Wafer, K.; Johnson, J.A.; Goux, Ludovic; Schwitters, M.; Paraschiv, Vasile; Maes, David; Haspeslagh, Luc; Caputa, Concetta; Zambrano, R.; Wouters, Dirk (2004)