Browsing by author "Uedono, Akira"
Now showing items 1-14 of 14
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Characterization of extreme Si thinning proces for wafer-to-wafer stacking
Inoue, Fumihiro; Jourdain, Anne; De Vos, Joeri; Peng, Lan; Liebens, Maarten; Armini, Silvia; Uedono, Akira; Rebibis, Kenneth June; Miller, Andy; Beyne, Eric; Sleeckx, Erik (2016) -
Characterization of porous low-k dielectric films by using positron annihilation
Uedono, Akira; Armini, Silvia; Krause-Rehberg, R; Wagner, A (2018) -
Characterization of porous structures in advanced low-k films with thin TaN layers using monoenergetic positron beams
Uedono, Akira; Verdonck, Patrick; Delabie, Annelies; Swerts, Johan; Witters, Thomas; Conard, Thierry; Baklanov, Mikhaïl; Van Elshocht, Sven; Oshima, Nagayasu; Suzuki, Ryoichi (2013) -
Defect identification in bonding surface layer by positron annihilation spectroscopy
Inoue, Fumihiro; Peng, Lan; Iacovo, Serena; Nagano, Fuya; Sleeckx, Erik; Beyer, Gerald; Uedono, Akira; Beyne, Eric (2019) -
Detailed characterization of the effects of plasma treatments on an advanced 2.0 low-k material
Verdonck, Patrick; Maheshwari, Abhishek; Swerts, Johan; Tielens, Hilde; Franquet, Alexis; Loyo Prado, Jana; Armini, Silvia; Baklanov, Mikhaïl; Van Elshocht, Sven; Uedono, Akira; Roque Huanca, Danilo; Gomes dos Santos Filho, Sebastiao; Kellerman, Guinther (2013) -
Influence of Si wafer thinning processes on (Sub)surface defects
Inoue, Fumihiro; Jourdain, Anne; Peng, Lan; Phommahaxay, Alain; De Vos, Joeri; Rebibis, Kenneth June; Miller, Andy; Sleeckx, Erik; Beyne, Eric; Uedono, Akira (2017) -
Interfacial Conductivity Enhancement and Pore Confinement Conductivity-Lowering Behavior inside the Nanopores of Solid Silica-gel Nanocomposite Electrolytes
Sagara, Akihiko; Yabe, Hiroki; Chen, Xubin; Put, Brecht; Hantschel, Thomas; Mees, Maarten; Arase, Hidekazu; Kaneko, Yukihiro; Uedono, Akira; Vereecken, Philippe (2021) -
Morphological characterization and mechanical behavior by dicing and thinning on direct bonded Si wafer
Inoue, Fumihiro; Podpod, Arnita; Peng, Lan; Phommahaxay, Alain; Rebibis, Kenneth June; Uedono, Akira; Beyne, Eric (2020) -
Pore structure analysis of ionic liquid-templated porous silica using positron annihilation lifetime spectroscopy
Sagara, Akihiko; Hiroki, Yabe; Chen, Xubin; Vereecken, Philippe; Uedono, Akira (2020) -
Probing the effect of point defects on the leakage blocking capability of Al0.1Ga0.9N/Si structures using a monoenergetic positron beam
Uedono, Akira; Zhao, Ming; Simoen, Eddy (2016-12) -
Surface sealing using self-assembled monolayers and its effect on metal diffusion in porous low-k dielectrics studied using monoenergetic positron beams
Uedono, Akira; Armini, Silvia; Zhang, Yu; Kakizaki, Takeaki; Krause-Rehberg, Reinhard; Anwand, Wolfgang; Wagner, Andreas (2016) -
The influence of AlN nucleation layer on Radio Frequency (RF) transmission loss of GaN-on-Si structure
Chang, Shane; Zhao, Ming; Spampinato, Valentina; Franquet, Alexis; Hein, Do; Uedono, Akira; Chang, Li (2019) -
The influence of AlN nucleation layer on radio frequency transmission loss of AlN-on-Si hetero-structure
Chang, Shane; Zhao, Ming; Spampinato, Valentina; Franquet, Alexis; Hein, Do; Uedono, Akira; Tien Tung, Luong; Wang, Tsang Hsuan; Li, Chang (2020) -
Vacancy-Type Defects and Oxygen Incorporation in NiAl for Advanced Interconnects Probed by Monoenergetic Positron Beams and Atom Probe Tomography
Uedono, Akira; Fleischmann, Claudia; Soulie, Jean-Philippe; Ayyad, Mustafa; Scheerder, Jeroen; Adelmann, Christoph; Uzuhashi, Jun; Ohkubo, Tadakatsu; Michishio, Koji; Oshima, Nagayasu; Ishibashi, Shoji (2024)