Browsing by author "Celis, Jean-Pierre"
Now showing items 1-20 of 87
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A new generic surface micromachining module for MEMS hermetic packaging at temperatures below 200° C
Hellin Rico, Raquel; Celis, Jean-Pierre; Baert, Kris; Van Hoof, Chris; Witvrouw, Ann (2007) -
A novel approach to characterise a low-k dielectric polymer surface
Martin Hoyas, Ana; Schuhmacher, Jorg; Le, Quoc Toan; Whelan, Caroline; Schaekers, Marc; Celis, Jean-Pierre; Maex, Karen (2002) -
A novel approach to characterization of a low-k dielectric polymer surface
Martin Hoyas, Ana; Schuhmacher, Jorg; Whelan, Caroline; Baklanov, Mikhaïl; Carbonell, Laure; Schaekers, Marc; Celis, Jean-Pierre; Maex, Karen (2002) -
Additive influence on filling microvias with copper
Luhn, Ole; Ruythooren, Wouter; Van Hoof, Chris; Celis, Jean-Pierre (2008) -
Agent-based modeling of mems fluidic self-assembly
Mastrangeli, Massimo; Van Hoof, Chris; Baskaran, Rajashree; Celis, Jean-Pierre; Boehringer, Karl (2010) -
An investigation of stiction in Poly-SiGe micromirror
Ling, Fangzhou; De Coster, Jeroen; Beernaert, Roel; Witvrouw, Ann; Celis, Jean-Pierre; De Wolf, Ingrid (2011) -
Anisotropy studies of magnetic thin films on GaAs
Attenborough, Karen; Boeve, Hans; Cerisier, Magali; De Boeck, Jo; Celis, Jean-Pierre; Borghs, Gustaaf (1999) -
Anodic bonding and heterojunction emitter for thin-film silicon solar cell: two steps towards an epitaxy-free lift-off cell
Depauw, Valerie; Gordon, Ivan; Beaucarne, Guy; Poortmans, Jef; Mertens, Robert; Celis, Jean-Pierre (2007) -
Anodisation of branched and columnar macropores in n-type silicon under front-side illumination
Depauw, Valerie; Kim, Hyonju; Beaucarne, Guy; Poortmans, Jef; Celis, Jean-Pierre; Mertens, Robert (2007-06) -
Barrier and seed layer coverage in 3D structures with different aspect ratios using sputtering and ALD proecesses
Luhn, Ole; Van Hoof, Chris; Ruythooren, Wouter; Celis, Jean-Pierre (2008) -
Built-in self-limitation of masked aluminum anodization using photoresist
Zekry, Joseph; Celis, Jean-Pierre; Sabuncuoglu Tezcan, Deniz; Puers, Bob; Van Hoof, Chris; Tilmans, Harrie (2011) -
Challenges for Capillary Self-Assembly of Microsystems
Mastrangeli, Massimo; Ruythooren, Wouter; Celis, Jean-Pierre; Van Hoof, Chris (2011) -
Changing superfilling mode for copper electrodeposition in blind holes from differential inhibition to differential acceleration
Luhn, Ole; Radisic, Alex; Vereecken, Philippe; Van Hoof, Chris; Ruythooren, Wouter; Celis, Jean-Pierre (2009) -
Characteristics of copper electrodeposits on featureless substrates and in microvias with aspect ratio up to 10
Luhn, Ole; Radisic, Alex; Vereecken, Philippe; Van Hoof, Chris; Ruythooren, Wouter; Celis, Jean-Pierre (2009) -
Characterization of ALD diffusion barrier on low-k dielectric polymer by contact angle measurements
Martin Hoyas, Ana; Schuhmacher, Jorg; Celis, Jean-Pierre; Maex, Karen (2002) -
Characterization of interconnects resulting from capillary die-to-substrate self-assembly
Mastrangeli, Massimo; Ruythooren, Wouter; Van Hoof, Chris; Celis, Jean-Pierre (2008) -
Characterization of the etching of Ge sacrificial layers for surface micromachining of MEMS
Hellin Rico, Raquel; Du Bois, Bert; Celis, Jean-Pierre; Witvrouw, Ann (2004) -
Characterization of the growth of atomic layer deposited WNxCy films on various substrates
Martin Hoyas, Ana; Travaly, Youssef; Schuhmacher, Jorg; Sajavaara, Timo; Whelan, Caroline; Eyckens, Brenda; Richard, Olivier; Giangrandi,; Brijs, Bert; Jonas, A.M.; Vantomme, Andre; Vandervorst, Wilfried; Celis, Jean-Pierre; Maex, Karen (2005) -
Comparison between patterned and unpatterned electrodeposited spin-valve sensors
Attenborough, Karen; Boeve, Hans; De Boeck, Jo; Borghs, Gustaaf; Celis, Jean-Pierre (1999) -
Conformal dip-coating of patterned surfaces for capillary die-to-substrate self-assembly
Mastrangeli, Massimo; Ruythooren, Wouter; Van Hoof, Chris; Celis, Jean-Pierre (2009)