Browsing by author "Timmermans, Marina"
Now showing items 21-31 of 31
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EUV scattering from carbon nanotube pellicles: measurement and control
Pollentier, Ivan; Luttgenau, Bernard; Brose, Sascha; Timmermans, Marina; Huyghebaert, Cedric; Brems, Steven; Gallagher, Emily (2021) -
EUV scattering from CNT pellicles: measurement and control
Pollentier, Ivan; Luettgenau, Bernhard; Brose, Sascha; Timmermans, Marina; Huyghebaert, Cedric; Brems, Steven; Gallagher, Emily (2021) -
Experimental evaluation of the impact of carbon nanotube EUV pellicles on reticle imaging
Mochi, Iacopo; Timmermans, Marina; Gallagher, Emily; Mariano, Marina; Pollentier, Ivan; Rajendran, Rajeev; Helfenstein, Patrick; Fernandez, Sara; Kazazis, Dimitrios; Ekinci, Yasin (2019) -
Free-standing carbon nanotube films for extreme ultraviolet pellicle application
Timmermans, Marina; Pollentier, Ivan; Mariano, Marina; Korytov, Maxim; Liebens, Maarten; Schapmans, Elie; Huyghebaert, Cedric; Gallagher, Emily (2019) -
Introducing the EUV CNT pellicle
Lee, Jae Uk; Vanpaemel, Johannes; Pollentier, Ivan; Adelmann, Christoph; Zahedmanesh, Houman; Huyghebaert, Cedric; Timmermans, Marina; De Volder, Michael; Gallagher, Emily (2016) -
Introducing the euv cnt pellicle
Gallagher, Emily; Huyghebaert, Cedric; Lee, Jae Uk; Pollentier, Ivan; Timmermans, Marina; Zahedmanesh, Houman (2016) -
Novel membrane solutions for the EUV pellicle : better or not ?
Pollentier, Ivan; Lee, Jae Uk; Timmermans, Marina; Adelmann, Christoph; Zahedmanesh, Houman; Huyghebaert, Cedric; Gallagher, Emily (2017) -
Novel method for conformal LiMn2O4 thin films fabrication on planar and 3D microstructure substrates
Labyedh, Nouha; Timmermans, Marina; Mattelaer, Felix; Mees, Maarten; Detavernier, Christophe; Vereecken, Philippe (2016) -
Novel thin-film solid nanocomposite electrolyte for lithium-ion batteries by combined MLD and ALD
Hollevoet, Simon; Gandrud, Knut Bjarne; Timmermans, Marina; Put, Brecht; El Ajjouri, Yousra; Van de Kerckhove, Kevin; Detavernier, Christophe; Mees, Maarten; Vereecken, Philippe (2019) -
Self-limiting electropolymerisation of ultrathin, pinhole-free poly(phenylene oxide) film on carbon nanosheets
Deheryan, Stella; Cott, Daire; Muller, Robert; Timmermans, Marina; Heyns, Marc; Vereecken, Philippe (2015-07) -
The EUV CNT pellicle: balancing material properties to optimize performance
Pollentier, Ivan; Timmermans, Marina; Huyghebaert, Cedric; Brems, Steven; Gallagher, Emily (2020)