Browsing by author "Blasco, X."
Now showing items 1-9 of 9
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Breakdown spots on ultra-thin (EOT<1.5nm) HfO2/SiO2 stacks observed with enhanced - CAFM
Blasco, X.; Nafria, M.; Aymerich, X.; Petry, Jasmine; Vandervorst, Wilfried (2005) -
C-AFM Characterization of the dependance of AlHfOx electrical behaviour on post deposition annealing temperature
Blasco, X.; Petry, Jasmine; Nafria, M.; Aymerich, X.; Vandervorst, Wilfried (2003) -
Critical metrology for ultrathin high k dielectrics
Vandervorst, Wilfried; Brijs, Bert; Bender, Hugo; Conard, Thierry; Petry, Jasmine; Richard, Olivier; Blasco, X.; Nafría, M. (2003) -
Effect of N2 anneal on thin HfO2 layers studied by C-AFM
Petry, Jasmine; Vandervorst, Wilfried; Blasco, X. (2004) -
Electrical characterization of high-dielectric-constant/SiO2 metal-oxide-semiconductor gate stacks by a conductive atomic force microscope
Blasco, X.; Porti, M.; Nafria, M.; Petry, Jasmine; Vandervorst, Wilfried (2005) -
GAFM characterization of the dependence of HfAlOx electrical behavior on post-deposition annealing temperature
Blasco, X.; Petry, Jasmine; Nafria, M.; Aymerich, X.; Richard, Olivier; Vandervorst, Wilfried (2004) -
Nanoscale electrical characterization of HfO2/SiO2/MOS gate stackx with enhanced-CAFM
Nafria, M.; Blasco, X.; Porti, M.; Aguilera, L.; Aymerich, X.; Petry, Jasmine; Vandervorst, Wilfried (2005) -
Nanoscale post-breakdown conduction of HfO2/SiO2 MOS gate stacks studied by enhanced-CAFM
Blasco, X.; Nafria, M.; Aymerich, X.; Petry, Jasmine; Vandervorst, Wilfried (2005) -
Overview of 2D profiling in Imec
Duhayon, Natasja; Eyben, Pierre; Alvarez, David; Fouchier, Marc; Blasco, X.; Clarysse, Trudo; Vandervorst, Wilfried; Hellemans, L. (2003)