Browsing by author "Tahara, Shigeru"
Now showing items 1-15 of 15
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28nm pitch of line/space pattern transfer into silicon substrates with chemo-epitaxy directed self-assembly (DSA) process flow
Chan, BT; Tahara, Shigeru; Parnell, Doni; Rincon Delgadillo, Paulina; Gronheid, Roel; de Marneffe, Jean-Francois; Xu, Kaidong; Nishimura, Eiichi; Werner, Thilo (2013) -
Contact hole CD uniformity repair through directed self-assembly of cylindrical phase block copolymers
Gronheid, Roel; Singh, Arjun; Chan, BT; Rincon Delgadillo, Paulina; Nealey, Paul; Younkin, Todd; Romo Negreira, Ainhoa; Somervell, Mark; Tahara, Shigeru; Nafus, Kathleen (2012) -
Cryo-etching for integration in micro-electronic : Silicon deep etch for contact and low-k integration in Back end of line (BEOL)
Chanson, Romain; Lefaucheux, Philippe; Dussart, Remi; Shen, Peng; Urabe, Keiichiro; Dussarat, Christian; Maekawa, Kaoru; yatsuda, koichi; Tahara, Shigeru; de Marneffe, Jean-Francois (2017) -
Direct etched Cu characterization for advanced interconnects
Wen, Liang Gong; Yamashita, Fumiko; Tang, Baojun; Croes, Kristof; Tahara, Shigeru; Shimoda, Keiichi; Maeshiro, Takeru; Nishimura, Eiichi; Lazzarino, Frederic; Ciofi, Ivan; Boemmels, Juergen; Tokei, Zsolt (2015) -
Etching of Co-Pd with significantly reduced sidewall re-deposition
Radisic, Dunja; Nishimura, Eiichi; Kushibiki, Masato; Wataru, Shimizu; Tahara, Shigeru; Xu, Kaidong; Kim, Woosik; Boullart, Werner (2013) -
High Aspect Ratio Supervia Dual Damascene etch for iN5 and beyond
Puliyalil, Harinarayanan; Feurprier, Yannick; Oikawa, Noriaki; Vega Gonzalez, Victor; Briggs, Basoene; Montero Alvarez, Daniel; Lazzarino, Frederic; Tokei, Zsolt; Satoru, Nakamura; Tahara, Shigeru; Kumar, Kaushik (2021) -
High selective plasma etching for PMMA of block-copolymer in directed-self assembly
Chan, BT; Tahara, Shigeru (2012) -
Low damage ULK etching by means of high boiling point organic condensation
Chanson, Romain; Holtzer, Nicolas; Lefaucheux, Philippe; Dussart, Rémi; SHEN, Peng; URABE, Keiichiro; Dussarat, Christian; Maekawa, Kaoru; yatsuda, koichi; Tahara, Shigeru; de Marneffe, Jean-Francois (2017) -
Low damage ultra-low-k patterning using a high boiling point organic (HBPO) combined with NF3
Chanson, Romain; Tahara, Shigeru; Vanstreels, Kris; de Marneffe, Jean-Francois (2018) -
Low-k material cryoetch using high boiling point organic compounds to reduce plasma induced damage
Chanson, Romain; Tillocher, Thomas; Lefaucheux, Philippe; Dussart, Remi; Zhang, Liping; de Marneffe, Jean-Francois; Shen, P; Dussarrat, Chrsitian; Maekawa, Kaoru; yatsuda, koichi; Tahara, Shigeru (2018) -
Magnetic tunnel junctions etch and encapsulation process optimization for high-density STT-MRAM applications
Souriau, Laurent; Radisic, Dunja; Kundu, Shreya; Paraschiv, Vasile; Yamashita, Fumiko; Fujimoto, Kiwamu; Tahara, Shigeru; Maeda, K.; Kim, Woojin; Rao, Siddharth; Donadio, Gabriele Luca; Crotti, Davide; Tsvetanova, Diana; Swerts, Johan; Mertens, Sofie; Lin, Tsann; Couet, Sebastien; Piumi, Daniele; Kar, Gouri Sankar; Furnemont, Arnaud (2016) -
Progress in directed self-assembly hole shrink applications
Younkin, Todd; Gronheid, Roel; Rincon Delgadillo, Paulina; Chan, BT; Vandenbroeck, Nadia; Demuynck, Steven; Romo Negreira, Ainhoa; Parnell, Doni; Nafus, Kathleen; Tahara, Shigeru; Somervell, Mark (2013) -
Short- and damage-free process for patterning magnetic tunnel junctions for high-density application
Radisic, Dunja; Souriau, Laurent; Paraschiv, Vasile; Goossens, Danny; Yamashita, Fumiko; Koizumi, Nao; Tahara, Shigeru; Nishimura, Eichi; Kim, Woojin; Donadio, Gabriele Luca; Crotti, Davide; Swerts, Johan; Mertens, Sofie; Lin, Tsann; Couet, Sebastien; Piumi, Daniele; Kar, Gouri Sankar; Furnemont, Arnaud (2015) -
STT MRAM patterning challenges
Boullart, Werner; Radisic, Dunja; Paraschiv, Vasile; Cornelissen, Sven; Manfrini, Mauricio; yatsuda, koichi; Nishimura, Eiichi; Ohishi, Tetsuya; Tahara, Shigeru (2013) -
Ultra-low k dielectric and plasma damage control for advanced technology nodes (10-nm and below)
Lazzarino, Frederic; Krishtab, Mikhail; Tahara, Shigeru; Baklanov, Mikhaïl (2013)