Browsing by author "Caputa, Concetta"
Now showing items 1-9 of 9
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Influence of metal and SBT dry-etch on FeCAP properties and role of recovery anneals
Goux, Ludovic; Paraschiv, Vasile; Boullart, Werner; Lisoni, Judit; Schwitters, M.; Maes, David; Haspeslagh, Luc; Wouters, Dirk; Caputa, Concetta; Casella, P.; Zambrano, R.; Vecchio, G.; Monchoix, H. (2004) -
Integration of ferroelectric SrBi2Ta2O9-based capacitors beyond 0.18 CMOS technology
Johnson, J.; Goux, Ludovic; Schwitters, Michael; Paraschiv, Vasile; Maes, David; Haspeslagh, Luc; Wouters, Dirk; Caputa, Concetta; Casella, C.; Zambrano, R.; Vecchio, Emma; Monchoix, Hervé; Van Autryve, Luc; Lisoni, Judit (2003) -
Integration of ferroelectric SrBi2Ta2O9-based capacitors in 0.35 μm CMOS technology
Lisoni, Judit; Johnson, Jo; Goux, Ludovic; Schwitters, Michael; Paraschiv, Vasile; Maes, David; Haspeslagh, Luc; Caputa, Concetta; Casella, P.; Zambrano, R.; Vecchio, G.; Monchoix, H.; Van Autryve, Luc; Wouters, Dirk (2004) -
Integration of MOCVD SBT stacked ferroelectric capacitors in a 0.35 μm CMOS technology
Maes, David; Everaert, Jean-Luc; Goux, Ludovic; Lisoni, Judit; Paraschiv, Vasile; Schwitters, M.; Haspeslagh, Luc; Wouters, Dirk; Artoni, C.; Caputa, Concetta; Casella, P.; Corallo, G.; Russo, G.; Zambrano, R.; Monchoix, H.; Van Autryve, Luc (2004) -
Integration of MOCVD SBT stacked ferroelectric capacitors in A 0.35um CMOS technology
Maes, David; Everaert, Jean-Luc; Goux, Ludovic; Lisoni, Judit; Paraschiv, Vasile; Schuster, Thomas; Haspeslagh, Luc; Wouters, Dirk; Artoni, C.; Caputa, Concetta; Casella, P.; Corallo, G.; Russo, G.; Zambrano, R.; Monchoix, H.; Van Autryve, Luc (2004) -
Process and substrate effects on the properties of MOCVD-deposited SrBi2Ta2O9 films
Schwitters, M.; Everaert, Jean-Luc; Lisoni, Judit; Paraschiv, Vasile; Goux, Ludovic; Wouters, Dirk; Monchoix, H.; Caputa, Concetta; Zambrano, R. (2004) -
Spacers alternatives for integration of 3D stacked SBT FeCAPs
Lisoni, Judit; Johnson, J.; Everaert, Jean-Luc; Paraschiv, Vasile; Boullart, Werner; Maes, David; Haspeslagh, Luc; Wouters, Dirk; Caputa, Concetta; Casella, P.; Zambrano, R.; Vecchio, Emma; Monchoix, Hervé; Van Autryve, Luc (2003) -
Stress evolution in integrated SrBi2Ta2O9 ferroelectric layers
Lisoni, Judit; Wafer, K.; Johnson, J.A.; Goux, Ludovic; Schwitters, M.; Paraschiv, Vasile; Maes, David; Haspeslagh, Luc; Caputa, Concetta; Zambrano, R.; Wouters, Dirk (2004) -
Thermo-mechanical stability of 3-D SrBi2Ta2O9 ferroelectric capacitors
Lisoni, Judit; Wafer, K.; Johnson, J.A.; Vandevelde, Bart; Brongersma, Sywert; Goux, Ludovic; Paraschiv, Vasile; Maes, David; Haspeslagh, Luc; Wouters, Dirk; Caputa, Concetta; Zambrano, R. (2004)