Browsing by author "Gijbels, Renaat"
Now showing items 1-11 of 11
-
Capablities of TOF-SIMS to study the influence of different oxidation conditions on metal contamination redistribution
De Witte, Hilde; De Gendt, Stefan; Douglas, M.; Conard, Thierry; Kenis, Karine; Mertens, Paul; Vandervorst, Wilfried; Gijbels, Renaat (1999) -
Evaluation of time-of-flight secondary ion mass spectrometry for metal contamination monitoring on Si wafer surfaces
De Witte, Hilde; De Gendt, Stefan; Douglas, M.; Conard, Thierry; Kenis, Karine; Mertens, Paul; Vandervorst, Wilfried; Gijbels, Renaat (2000) -
Modeling of bombardment induced oxidation of silicon
De Witte, Hilde; Vandervorst, Wilfried; Gijbels, Renaat (2001) -
Modeling of bombardment induced oxidation of silicon with and without oxygen flooding
De Witte, Hilde; Vandervorst, Wilfried; Gijbels, Renaat (1997) -
Modeling of bombardment induced oxidation of silicon with and without oxygen flooding
De Witte, Hilde; Vandervorst, Wilfried; Gijbels, Renaat (1998) -
SIMS analysis of oxynitrides: evidence for nitrogen diffusion induced by oxygen flooding
De Witte, Hilde; Conard, Thierry; Vandervorst, Wilfried; Gijbels, Renaat (2000) -
Study of oxynitrides with dual beam TOF-SIMS
De Witte, Hilde; Conard, Thierry; Vandervorst, Wilfried; Gijbels, Renaat (2000) -
TOF-SIMS artifact in the analysis of ZrO2/SiO2/Si stacks
De Witte, Hilde; Conard, Thierry; Vandervorst, Wilfried; Gijbels, Renaat (2001) -
XPS and TOFSIMS studies of shallow Si/Si1-xGex/Si layers
Conard, Thierry; De Witte, Hilde; Vandervorst, Wilfried; Caymax, Matty; Loo, Roger; Verheyen, P.; Gijbels, Renaat (1998) -
XPS and TOFSIMS studies of shallow Si/Si1-xGex/Si layers
Conard, Thierry; De Witte, Hilde; Loo, Roger; Verheyden, P.; Vandervorst, Wilfried; Caymax, Matty; Gijbels, Renaat (1999) -
XPS study of ion induced oxidation of silicon with and without oxygen flooding
De Witte, Hilde; Conard, Thierry; Sporken, R.; Gouttebaron, R.; Magnée, R.; Vandervorst, Wilfried; Caudano, R.; Gijbels, Renaat (2000)