Browsing by author "Witvrouw, Ann"
Now showing items 21-40 of 234
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Apparent and steady-state etch rates in thin film etching and underetching of microstructures. II: Characterisation
Van Barel, Gregory; Du Bois, Bert; Van Hoof, Rita; De Wachter, Jef; De Ceuninck, Ward; Witvrouw, Ann (2010) -
Business opportunities for poly-SiGe as post-CMOS MEMS integration technology
Pieters, Philip; Borzi, Raffaella; Witvrouw, Ann (2004-09) -
Characterization of (near) hermetic zero-level packages for MEMS
De Moor, Piet; Baert, Kris; De Wolf, Ingrid; Jourdain, Anne; Tilmans, Harrie; Witvrouw, Ann; Van Hoof, Chris (2005) -
Characterization of reduced-pressure chemical vapor deposition polycrystalline silicon germanium deposited at temperatures <= 550 degrees C
Sedky, S.; Witvrouw, Ann; Caymax, Matty; Saerens, A.; Van Houtte, P. (2002) -
Characterization of the etching of Ge sacrificial layers for surface micromachining of MEMS
Hellin Rico, Raquel; Du Bois, Bert; Celis, Jean-Pierre; Witvrouw, Ann (2004) -
CMOS compatible polycrystalline silicon-germanium based pressure sensors
Gonzalez, Pilar; Guo, Bin; Rakowski, Michal; De Meyer, Kristin; Witvrouw, Ann (2012) -
CMOS compatible SiGe micromirrors
Beernaert, Roel; Avci, Aykut; De Smet, Jelle; De Coster, Jeroen; Witvrouw, Ann; De Smet, Herbert (2011) -
CMOS-integrated poly-SiGe cantilevers with read/write system for probe storage device
Severi, Simone; Heck, J.; Chou, T.K.A.; Belov, N.; Park, J.S.; Harrar, D.; Jain, A.; Van Hoof, Rita; Du Bois, Bert; De Coster, Jeroen; Varela Pedreira, Olalla; Willegems, Myriam; Vaes, Jan; Jamieson, Geraldine; Haspeslagh, Luc; Adams, D.; Rao, V.; Decoutere, Stefaan; Witvrouw, Ann (2009) -
CMOS-integrated poly-SiGe piezoresistive pressure sensor
Gonzalez, Pilar; Rakowski, Michal; San Segundo Bello, David; Severi, Simone; De Meyer, Kristin; Witvrouw, Ann (2012) -
CMOS-integrated SiGe MEMS: application to micro-mirror arrays
Witvrouw, Ann; Beyne, Eric; Haspeslagh, Luc; De Wolf, Ingrid (2009) -
CMOS-MEMS integration today and tomorrow
Witvrouw, Ann (2008) -
Comparison of the electromigration behavior of Al(MgCu) with Al(Cu) and Al(SiCu)
Li, Hua; Witvrouw, Ann; Jin, S.; Bender, Hugo; Maex, Karen; Froyen, L. (1998) -
Comparison of three methods to measure the internal pressure of empty MEMS packages
Wang, Bo; Tanaka, Shuji; De Coster, Jeroen; Severi, Simone; Witvrouw, Ann; Wevers, Martine; De Wolf, Ingrid (2012) -
Contact resistance modeling for NEMS ohmic relays using highly doped SiGe contact
Ramezani, Maliheh; Severi, Simone; Tamaddon, Amir-Hossein; Vanstreels, Kris; Tilmans, Harrie; Rottenberg, Xavier; De Meyer, Kristin; Witvrouw, Ann (2013) -
Contact resistivity of laser annealed SiGe for MEMS structural layers deposited at 210C
El Rifai, Joumana; Sedky, Sherif; Abdel Aziz, Ahmed; Puers, Bob; Van Hoof, Chris; Witvrouw, Ann (2010) -
Contact resistivity of laser annealed SiGe for MEMS structural layers deposited at 210C
El Rifai, Joumana; Witvrouw, Ann; Abdel Aziz, Ahmed; Puers, Bob; Van Hoof, Chris; Sedky, Sherif (2011) -
Creep as a reliability problem in MEMS
Modlinski, Robert; Witvrouw, Ann; Ratchev, Petar; Jourdain, Anne; Simons, Veerle; Tilmans, Harrie; den Toonder, Jaap M.J.; Puers, Bob; De Wolf, Ingrid (2004) -
Creep as a reliability problem in MEMS
Modlinski, Robert; Witvrouw, Ann; Ratchev, Petar; Puers, Bob; Toonder, J.M.J; De Wolf, Ingrid (2004) -
Creep characterization of Al alloy thin films for use in MEMS applications
Modlinski, Robert; Witvrouw, Ann; Ratchev, Petar; Puers, Robert; den Toonder, Jaap M.J.; De Wolf, Ingrid (2004) -
Creep resistant aluminum alloys for use in MEMS
Modlinski, Robert; Witvrouw, Ann; Ratchev, Petar; Puers, Bob; De Wolf, Ingrid (2005)