Browsing by author "Fenger, Germain"
Now showing items 21-29 of 29
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N7 logic via patterning using templated DSA: implementation aspects
Bekaert, Joost; Doise, Jan; Gronheid, Roel; Ryckaert, Julien; Vandenberghe, Geert; Fenger, Germain; Her, YoungJun; Cao, Yi (2015) -
Pattern fidelity verification for logic design in EUV lithography
Sugawara, Mino; Hendrickx, Eric; Philipsen, Vicky; Maloney, Chris; Fenger, Germain (2014) -
Probability prediction of EUV process failure due to resist-exposure stochastic: applications of Gaussian random fields excursions and Rice's formula
Latypov, Azat; Khaira, Damon; Fenger, Germain; Sturtevant, John; Wei, Chih-I; De Bisschop, Peter (2020) -
Single Mask Solution to Pattern BLP and SNLP using 0.33NA EUV for Next Generation DRAM Manufacturing
Sah, Kaushik; Cross, Andrew; Das, Sayantan; Fallica, Roberto; Lee, Jeonghoon; Kim, Ryan Ryoung han; Halder, Sandip; Maguire, Ethan; Armeanu, Ana-Maria; Sears, Monica; Lafferty, Neal; Liubich, Vlad; Wei, Chih-, I; Fenger, Germain (2022) -
Study of DSA interaction range using Gaussian convolution
Yi, Linda; Bekaert, Joost; Gronheid, Roel; Fenger, Germain; Nafus, Kathleen; Wong, H.-S. (2015) -
Towards directed self-assembly for future CMOS scaling: A study on variability of cylindrical patterns
Boeckx, Carolien; Doise, Jan; Fenger, Germain; Cao, Yi; Gronheid, Roel; De Gendt, Stefan (2015) -
Unsupervised Machine Learning based SEM Image Denoising for robust Contour Detection
Dey, Bappaditya; Wu, Stewart; Das, Sayantan; Khalil, Kasem; Halder, Sandip; Leray, Philippe; Samir, Bhamidipati; Ahi, Kiarash; Pereira, Mark; Fenger, Germain; Bayoumi, Magdy A. (2021) -
Validation of improved compact model in grapho-epitaxy Directed-Self-Assembly (DSA)
Fenger, Germain; Bekaert, Joost; Torres, Andres; Granik, Yuri; Krasnova, Polina; Doise, Jan; Boeckx, Carolien; Vandenberghe, Geert; Gronheid, Roel (2015) -
Wafer and simulations study comparing 5 LELE decomposition algorithms for both compliant and non-compliant lay-outs
Fenger, Germain; La Cour, Pat; Tritchkov, Alex; Komirenko, Sergiy; Wiaux, Vincent (2009)