Browsing by author "Röhr, Erika"
Now showing items 21-34 of 34
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Investigation of fluorine in dry ultrathin silicon oxides
Vereecke, Guy; Röhr, Erika; Carter, Richard; Conard, Thierry; De Witte, Hilde; Heyns, Marc (2001) -
Issues, achievements and challenges towards integration of high-k dielectrics
Caymax, Matty; De Gendt, Stefan; Vandervorst, Wilfried; Heyns, Marc; Bender, Hugo; Carter, Richard; Conard, Thierry; Degraeve, Robin; Groeseneken, Guido; Kubicek, Stefan; Lujan, Guilherme; Pantisano, Luigi; Petry, Jasmine; Röhr, Erika; Van Elshocht, Sven; Zhao, Chao; Cartier, Eduard; Chen, Jerry; Cosnier, Vincent; Jang, Se Aug; Kaushik, Vidya; Kerber, Andreas; Kluth, Jon; Lin, S.; Tsai, Wilman; Young, Edward; Manabe, Y. (2002) -
Issues, achievements and challenges towards intergration of high-k dielectrics
Heyns, Marc; Bender, Hugo; Caymax, Matty; Carter, R; Claes, Martine; Conard, Thierry; Boullart, Werner; De Gendt, Stefan; Degraeve, Robin; Deweerd, Wim; Groeseneken, Guido; Houssa, Michel; Kubicek, Stefan; Lujan, Guilherme; Nohira, H.; Pantisano, Luigi; Petry, Jasmine; Röhr, Erika; Vandervorst, Wilfried; Van Elshocht, Sven; Xu, Zhen; Zhao, Chao; Cartier, E.; Chen, J.; Cosnier, V.; Green, M.; Jang, S.E.; Kaushik, Vidya; Kerber, A.; Kluth, J.; Lin, S.; Tsai, Wilman; Young, Edward; Manabe, Y. (2002) -
Laser-assisted removal of particles on silicon wafers
Vereecke, Guy; Röhr, Erika; Heyns, Marc (1999) -
Ozonated HF applications in a spray processing tool
Claes, M.; Röhr, Erika; De Gendt, Stefan; Heyns, Marc; Lagrange, Sébastien; Bergman, E. (2001) -
Ozonated HF applications in a spray processing tool
Claes, Martine; Röhr, Erika; De Gendt, Stefan; Lagrange, Sébastien; Bergman, E.; Heyns, Marc (2002) -
Pre-diffusion cleaning using ozone and HF
Bergman, E. J.; Lagrange, Sébastien; Claes, Martine; De Gendt, Stefan; Röhr, Erika (2001) -
Role of UV/chlorine exposure during dry surface conditioning before integrated epi deposition process
Ruzyllo, Jerzy; Röhr, Erika; Baeyens, Martien; Conard, Thierry; Mertens, Paul; Heyns, Marc (1998) -
Role of UV/chlorine exposure during dry surface conditioning before integrated epi deposition process
Ruzyllo, Jerzy; Röhr, Erika; Caymax, Matty; Baeyens, Martien; Conard, Thierry; Mertens, Paul; Heyns, Marc (1999) -
Scaling of Hf-based gate dielectrics - integration with polysilicon gates
De Gendt, Stefan; Caymax, Matty; Chen, Jerry; Claes, Martine; Conard, Thierry; Delabie, Annelies; Deweerd, Wim; Kaushik, Vidya; Kerber, Andreas; Kubicek, Stefan; Niwa, Masaaki; Pantisano, Luigi; Puurunen, Riikka; Ragnarsson, Lars-Ake; Schram, Tom; Shimamoto, Yasuhiro; Tsai, Wilman; Röhr, Erika; Van Elshocht, Sven; Witters, Thomas; Young, Edward; Zhao, Chao; Heyns, Marc (2003) -
Scaling of high-k dielectrics towards sub-1nm EOT
Heyns, Marc; Beckx, Stephan; Bender, Hugo; Blomme, Pieter; Boullart, Werner; Brijs, Bert; Carter, Richard; Caymax, Matty; Claes, Martine; Conard, Thierry; De Gendt, Stefan; Degraeve, Robin; Delabie, Annelies; Deweerd, Wim; Groeseneken, Guido; Henson, Kirklen; Kauerauf, Thomas; Kubicek, Stefan; Lucci, Luca; Lujan, Guilherme; Mentens, Jimmy; Pantisano, Luigi; Petry, Jasmine; Richard, Olivier; Röhr, Erika; Schram, Tom; Vandervorst, Wilfried; Van Doorne, Patrick; Van Elshocht, Sven; Westlinder, Jörgen; Witters, Thomas; Zhao, Chao; Cartier, Eduard; Chen, Jerry; Cosnier, Vincent; Green, Martin; Jang, Se Aug; Kaushik, Vidya; Kerber, Andreas; Kluth, Jon; Lin, Steven; Tsai, Wilman; Young, Edward; Manabe, Yukiko; Shimamoto, Yasuhiro; Bajolet, Philippe; De Witte, Hilde; Maes, Jan; Date, Lucien; Pique, Didier; Coenegrachts, Bart; Vertommen, Johan; Passefort, Sophie (2003) -
Surface characterization after different wet chemical cleans
Claes, Martine; Röhr, Erika; Conard, Thierry; De Smedt, Frank; De Gendt, Stefan; Storm, Wolfgang; Bauer, T.; Mertens, Paul; Heyns, Marc (2001) -
The influence of defects on campatibility and yield of the HfO2-polysilicon gate stack for CMOS integration
Kaushik, Vidya; De Gendt, Stefan; Carter, Richard; Claes, Martine; Röhr, Erika; Pantisano, Luigi; Kluth, Jon; Kerber, Andreas; Cosnier, Vincent; Cartier, Eduard; Tsai, Wilman; Young, Edward; Green, Martin; Chen, Jerry; Jang, S.A.; Lin, S.; Delabie, Annelies; Van Elshocht, Sven; Manabe, Yukiko; Richard, Olivier; Zhao, Chao; Bender, Hugo; Caymax, Matty; Heyns, Marc (2003) -
The origins of fluorine in dry ultrathin silicon oxides
Vereecke, Guy; Röhr, Erika; Carter, Richard; Conard, Thierry; De Witte, Hilde; Heyns, Marc (2001)